Vacuum Pump Parallel Heating Circuit for Deposition Prevention
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Solution Overview
Problem
Conventional vacuum pumps with series-connected resistance heating elements are prone to complete shutdown upon failure, leading to reduced exhaust efficiency and shortened heating means life, causing product deposition and operational disruptions in semiconductor manufacturing.
Innovation Solution
A vacuum pump design with resistance heating elements connected in parallel, allowing for continuous heating even if individual elements fail, using connectors for easy maintenance and a current measuring system to determine failure conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If resistance heating elements are connected in series, then the heating means can be simplified in structure, but the reliability decreases because failure of any element causes complete shutdown
Solution Approach 1:
The heating means is segmented into multiple independent resistance heating elements (first, second, third elements) that can be independently connected to the power supply. This segmentation allows individual elements to be replaced or maintained without affecting the operation of other elements, thereby improving reliability while maintaining structural simplicity.
Solution Approach 2:
The patent changes the electrical connection parameter from series to parallel configuration. By connecting multiple resistance heating elements in parallel between the same two points of the power supply, the system ensures that failure of one element does not interrupt the heating function, as other elements continue to receive power and maintain the required temperature.
2Productivity
If resistance heating elements are used to prevent product deposition, then the exhaust flow path can be kept clear, but the heating means life is shortened due to complete shutdown upon failure
Solution Approach 1:
The patent implements preliminary action by providing multiple resistance heating elements that are pre-configured to provide redundant heating capability. If one element fails, the remaining elements continue to prevent product deposition, allowing for planned maintenance rather than emergency shutdowns, thereby extending the operational life of the heating means.
Solution Approach 2:
The system incorporates beforehand cushioning through the redundant heating elements. The multiple elements serve as a buffer against failure, ensuring that the heating function is maintained even when one element malfunctions. This cushioning effect prevents the complete shutdown that would otherwise occur, protecting the exhaust flow path from product deposition and extending system operational life.
3Device complexity
If a single heating element is used, then the structure is simple, but the heating coverage around the rotating body is insufficient
Solution Approach 1:
The heating function is segmented into multiple resistance heating elements positioned at different locations around the rotating body. The first heating element is arranged along the rotation axis, while the second and third elements are positioned at different angular positions. This segmentation provides comprehensive heating coverage of the exhaust flow path without requiring a single complex heating structure.
Solution Approach 2:
The patent merges multiple heating elements into a coordinated heating system. The first, second, and third resistance heating elements work together to provide uniform heating across the entire exhaust flow path. By combining the heating effects of multiple elements positioned strategically, the system achieves complete thermal coverage while maintaining individual element simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures continuous heating of the exhaust flow path, preventing product deposition and extending the life of the heating means, allowing uninterrupted operation of semiconductor manufacturing apparatus.
Implementation Method 1
the heating means includes a plurality of resistance heating elements connected in parallel to a pair of wiring lines
Data Source
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AI summary
The present invention provides a vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.