Vacuum Pump Partition Wall Gas Cooling Trap Design
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Solution Overview
Problem
Turbomolecular pumps face challenges in efficiently cooling gas and maintaining exhaust performance due to clogging in the exhaust flow path, which requires frequent maintenance and inefficient sublimation of sedimentary components, especially when the cooling trap is integrated within the flow path or separated from it.
Innovation Solution
A vacuum pump design featuring a partition wall that guides gas to a cooling trap portion, integrated with rotor blades, and a thread groove exhaust mechanism, allowing efficient cooling and reducing maintenance by preventing deposit formation through effective gas separation and sublimation, while enabling easy cleaning of the cooling trap without disassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the cooling trap portion is disposed in the middle of the exhaust flow path, then the gas cooling efficiency is improved, but deposits precipitate in the exhaust flow path causing clogging and requiring frequent maintenance
Solution Approach 1:
The exhaust flow path is divided into two separate paths: a main exhaust flow path and a branch flow path leading to the cooling trap portion. This segmentation allows the cooling trap to be fed with gas without being part of the main exhaust path, preventing deposit clogging in the main path while still enabling efficient cooling in the trap portion.
Solution Approach 2:
A partition wall with a specific opening structure acts as an intermediary device to guide gas from the pump mechanism to the cooling trap portion. The partition wall creates a controlled flow path that directs gas molecules toward the cooling trap without allowing deposits to form and clog the main exhaust path.
2Reliability
If the cooling trap portion is separated from the exhaust flow path, then deposit formation in the exhaust flow path is prevented, but gas separation efficiency is insufficient
Solution Approach 1:
The partition wall is designed with a specific opening configuration that creates a three-dimensional flow guidance structure. This dimensional approach allows gas to be effectively directed into the cooling trap portion from the pump mechanism, achieving good gas separation efficiency without the cooling trap being part of the main exhaust path.
Solution Approach 2:
The partition wall serves as an intermediary structure that bridges the separated exhaust flow path and the cooling trap portion. It guides gas molecules from the pump mechanism into the cooling trap through controlled openings, ensuring efficient gas separation while keeping the cooling trap separate from the main exhaust path to prevent deposits.
3Temperature
If the cooling trap is integrated within the flow path, then gas cooling is efficient, but maintenance requires disassembly and is difficult
Solution Approach 1:
The cooling trap portion is designed as a separable component that can be detached from the main pump body. The partition wall and cooling trap are configured to allow easy removal and installation, enabling maintenance personnel to access and clean the cooling trap without disassembling the entire pump, thus improving ease of repair while maintaining cooling efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design efficiently cools gas, reduces maintenance needs, and prevents deposit formation in the exhaust flow path, ensuring consistent performance by actively guiding gas to the cooling trap and utilizing a non-adhesive coating for easy cleaning.
Implementation Method 1
a cooling trap portion (41) that cools the gas led out from the pump mechanism portion (17) and causes the gas to flow out to a side of the thread groove exhaust mechanism portion (18)
Implementation Method 2
the cooling trap portion actively sublimates (solidifies, in this case) the sedimentary components contained in the gas
Implementation Method 3
a partition wall portion (29) that guides the gas led out from the pump mechanism portion (17) to the cooling trap portion (41)
Implementation Method 4
the cooling trap portion has a non-adhesive coating applied to at least a part of an inner surface of the cooling trap portion
Data Source
Figure 1
Figure 2A~2B
Figure 3A~3B
AI summary
To provide a vacuum pump that is capable of efficiently cooling gas and requires less maintenance. The vacuum pump includes: a main body casing having an inlet portion and an outlet portion for gas; a turbomolecular pump mechanism portion in which a stator blade and a rotor blade are formed; a thread groove pump mechanism portion provided at a downstream side of the turbomolecular pump mechanism portion; a cooling trap portion that cools the gas led out from the turbomolecular pump mechanism portion and causes the gas to flow out to a side of the thread groove pump mechanism portion; and a partition wall that guides the gas led out from the turbomolecular pump mechanism portion to the cooling trap portion.