Vacuum Pump Partition Wall Thermal Isolation

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Solution Overview

Problem

Conventional vacuum pumps face issues with gas accumulation and overheating due to temperature drops in the vicinity of thread groove exhaust flow channels and flow channels, leading to clogging and electrical component overheating, which affects pump performance and maintenance frequency.

Innovation Solution

A vacuum pump design featuring a partition wall that covers the flow channel from the casing to the outlet port, using heat-insulating materials and a multi-cylindrical outlet port structure to maintain high temperatures and prevent heat dissipation, along with a control means for the heating system to manage temperature effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a heating means such as a band heater is provided on the outside of the casing to keep the temperatures in the vicinity of the exits of the thread groove exhaust flow channels and the flow channel high, then the temperature of the process gas is maintained and product accumulation is prevented, but heat is frequently dissipated to the outside due to the casing being exposed to outside air, resulting in poor heating efficiency and overheating of electrical components

Engineering Contradiction:
Improvetemperature of process gas in flow channelVSAvoidheating efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The flow channel is segmented from the casing by introducing a partition wall, creating a thermally isolated region. This segmentation allows independent temperature control of the flow channel without affecting the entire casing, thereby preventing heat loss to the outside and avoiding overheating of electrical components housed in the casing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A partition wall is introduced as an intermediary structure between the flow channel and the casing. This partition wall, when combined with heat insulating material, acts as a thermal barrier that prevents direct heat transfer between the heated flow channel and the external environment, thereby improving heating efficiency and protecting electrical components.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If the casing is exposed to outside air, then the structure is simple and easy to manufacture, but the wall temperatures in the vicinity of the exits of the thread groove exhaust flow channels and the flow channel are low, causing compression heat to be easily dissipated and product accumulation to occur

Engineering Contradiction:
Improvecasing structure simplicityVSAvoidwall temperature of flow channel
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The flow channel region is segmented from the main casing by introducing a partition wall. This creates a distinct thermal zone that can be independently heated and insulated, maintaining high wall temperatures in the flow channel without complicating the overall casing structure or manufacturing process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A partition wall with heat insulating material is introduced as an intermediary structure between the flow channel and the external environment. This intermediary prevents direct heat loss to the outside air while maintaining the simplicity of the overall casing structure, thereby keeping wall temperatures high without complex manufacturing.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If the flow channel is not thermally isolated from the casing, then the device structure is simple, but the temperature of the process gas decreases and product accumulation clogs the exits of the thread groove exhaust flow channels and the flow channel

Engineering Contradiction:
Improvethermal insulation structureVSAvoidflow channel operation
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The flow channel is segmented from the casing by introducing a partition wall, creating a thermally isolated environment. This segmentation prevents product accumulation and clogging by maintaining stable temperatures, thereby improving reliability without adding significant device complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A partition wall with heat insulating material serves as an intermediary structure that thermally isolates the flow channel from the casing. This intermediary prevents temperature drops and product accumulation, ensuring reliable operation of the flow channel while adding minimal structural complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration efficiently heats the flow channel and prevents gas accumulation, maintains stable temperatures, and extends the lifespan of electrical components by preventing overheating, thus improving pump performance and reducing maintenance needs.

Implementation Method 1

rod-like heater HT functioning as a heating means is embedded in the partition wall 21, thereby heating the partition wall 21 with the heat generated by the heater HT itself

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

the partition wall 21 is joined to other pump component (an inner circumferential step portion of the pump base 1B in the example shown in FIG. 1) through a heat insulating material 22 formed of a poor heat conductor (such as a stainless alloy, ceramic)

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentEP3104015B1Vacuum pump
Publication Date: 2021.11.10 EDWARDS JAPAN
  • EP3104015B1 patent drawingFigure 1
  • EP3104015B1 patent drawingFigure 2
  • EP3104015B1 patent drawingFigure 3

AI summary

To provide a vacuum pump that is capable of efficiently heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and is suitable for preventing the accumulation of a product that is caused by a decrease in the temperature of process gas in the vicinity of the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.