Vacuum Pump Power Source Integration for Compact Design
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Solution Overview
Problem
Turbo-molecular pumps face challenges in downsizing their power source devices due to the need for multiple heater drive circuits, which are complex and bulky, especially when using alternating current power for heating, leading to difficulties in reducing the overall size of the device.
Innovation Solution
A vacuum pump system that integrates a pump device with a power source device, utilizing direct current heaters and an alternating current heater, along with a noise filter and a cooling device, to control and power the heaters efficiently, allowing for a more compact design by reducing the size of the power source device through the use of smaller semiconductor switches and eliminating the need for extensive leakage detection circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple alternating current heater drive circuits are provided for heating multiple target portions, then heating function is improved, but device complexity and size increase
Solution Approach 1:
A single alternating current heater drive circuit is designed to control multiple alternating current heaters (exhaust pipe heater, stationary blade heater, base heater) through a unified control architecture. The drive circuit incorporates multiple heating control functions that can selectively activate different heaters based on temperature sensor feedback, eliminating the need for separate dedicated drive circuits for each heater while maintaining comprehensive heating capabilities across all target portions.
2Reliability
If alternating current heater drive circuits with leakage detection circuits are provided, then safety is improved, but device complexity and size increase
Solution Approach 1:
The leakage detection function is merged into the unified alternating current heater drive circuit rather than being implemented as separate detection circuits for each heater. The drive circuit incorporates integrated leakage detection capability that monitors all heater connections through a common detection mechanism, reducing the overall number of components while maintaining safety across all heating elements.
3Measurement precision
If multiple separate heater drive circuits are provided, then control precision is improved, but device complexity increases
Solution Approach 1:
The unified alternating current heater drive circuit is segmented into multiple independent heating control channels, each responsible for a specific heater (exhaust pipe, stationary blade, or base). Each channel incorporates its own temperature sensor feedback and control logic, allowing precise independent control of each heating zone while sharing common power supply and safety detection infrastructure, thus achieving high control precision without proportionally increasing overall circuit complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integration of direct current and alternating current heaters with a compact power source device enables a significant downsizing of the vacuum pump system, reducing circuit heat generation and allowing for more efficient control of heating temperatures, thus addressing the complexity and size issues of traditional systems.
Implementation Method 1
direct current heaters... alternating current heater... to generate heat from the heater
Implementation Method 2
a cooling device interposed between the pump housing and the power source device housing
Data Source
AI summary
A vacuum pump includes a pump device including a pump motor, an exhaust function section configured to exhaust sucked gas, and at least two direct current heaters, and a pump-integrated power source device. The pump-integrated power source device includes a pump control section, a pump power source configured to supply power to the pump control section, a direct current heater control section configured to control the two direct current heaters, and a direct current heater power source configured to supply power to the direct current heater control section.