Multistage Vacuum Pump Purge Gas Control Module

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Solution Overview

Problem

Existing systems for supplying purge gas to multistage vacuum pumps lack efficient control over gas flow rates, often requiring numerous valves and manual adjustments, which can lead to suboptimal matching with process gas flow and result in unnecessary nitrogen consumption and performance issues.

Innovation Solution

An apparatus with a control module that maintains a fixed ratio of gas flow rates through outlets, allowing for infinitely variable control of gas flow by adjusting inlet pressure and flow rate, using sensors and a variable restrictor to ensure proportional flow through each port, regardless of overall flow rate or pressure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual adjustment of restrictors is used to control purge gas flow rates, then individual stage purge levels can be measured and adjusted, but the process is time consuming and requires individual measurement of each stage purge

Engineering Contradiction:
Improvepurge level measurementVSAvoidadjustment time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system uses sensors to automatically detect purge gas flow rates at each stage and feeds this information back to the control module, which then automatically adjusts the restrictors to maintain optimal purge levels, eliminating the need for manual measurement and adjustment by operators

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The control module continuously monitors purge gas flow rates through sensors and uses this feedback information to automatically adjust restrictor settings, ensuring optimal purge levels are maintained without requiring manual intervention or individual stage measurements

Inventive Principle:
Principle #23Feedback

2Adaptability or versatility

If a large number of valves are used to achieve step changes in gas purge flow rates, then different purge rate combinations can be achieved, but the device complexity increases

Engineering Contradiction:
Improvepurge rate combinationVSAvoidnumber of valves
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The system replaces fixed step-change valve configurations with dynamically adjustable restrictors controlled by a control module that continuously optimizes purge gas flow rates based on real-time process conditions, eliminating the need for multiple discrete valves

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control module varies the flow resistance parameters of the restrictors to achieve different purge gas flow rates, allowing continuous adjustment of purge rates without requiring multiple valves or complex manifold configurations

Inventive Principle:
Principle #35Parameter changes

3Reliability

If over-dilution of process gases occurs, then safety is improved, but unnecessary costs and loss of pumping performance result

Engineering Contradiction:
Improvepumping safetyVSAvoidpumping performance
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The control module continuously monitors process gas composition and purge gas flow rates, using this feedback to automatically adjust the amount of purge gas introduced to maintain optimal dilution levels that ensure safety while preserving pumping performance

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts the purge gas flow rate parameters based on real-time process conditions, increasing purge flow when safety requires higher dilution and reducing it when optimal pumping performance is needed, thereby avoiding both under-dilution and over-dilution

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables precise and automated control of purge gas supply, reducing nitrogen consumption, minimizing waste, and optimizing pumping performance by maintaining consistent flow ratios across all outlets, thus enhancing operational efficiency and cost-effectiveness.

Implementation Method 1

allowing for infinitely variable control of gas flow by adjusting inlet pressure and flow rate

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentEP2831423B2Vacuum pump system
Publication Date: 2023.07.26 EDWARDS LTD
  • EP2831423B2 patent drawingFigure 1
  • EP2831423B2 patent drawingFigure 2
  • EP2831423B2 patent drawingFigure 3

AI summary

The present invention relates to apparatus for supplying a purge gas to a multistage vacuum pump. Specifically, apparatus for supplying a purge gas to a multistage vacuum pump comprises a gas inlet in fluid communication with a plurality of gas outlets for supplying gas to respective ports of the multistage pump the gas outlets having control orifices for supplying gas to the respective ports at proportionally fixed gas flow rates, the apparatus further comprising a control module for controlling the gas flow to the gas inlet in response to a control signal. Thus, the flow rates can be controlled at different points in the multistage vacuum pump to efficiently distribute purge gas, as required.