Vacuum Pump Resilient Support for Vibration Isolation

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Solution Overview

Problem

Vacuum pumps face challenges with complex and costly elastomeric damping ring arrangements, which require precise machining, suffer from non-linear stiffness changes over time and temperature, and lead to increased vibration transmission due to elastomeric material creep and lubricant interaction, necessitating complex balancing processes.

Innovation Solution

A resilient support system using metallic materials with flexible members and fluid-supplied load-bearing damping films, replacing separate radial and axial elastomeric damping rings, providing low radial stiffness and simplified installation, and maintaining consistent damping characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If radial and axial elastomeric damping rings are used for vibration attenuation, then vibration isolation is improved, but device complexity and manufacturing cost increase due to complex damping ring locations and precise machining requirements

Engineering Contradiction:
Improvevibration transmissionVSAvoidmounting arrangement complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent combines the functions of separate radial and axial elastomeric damping rings into a single integrated resilient support structure. This merging eliminates the need for complex damping ring locations and multiple grooves, reducing mounting arrangement complexity while maintaining vibration isolation effectiveness.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The resilient support structure performs multiple functions simultaneously: it provides both radial and axial damping, supports the rolling bearing, and isolates vibrations. This multi-functionality eliminates the need for separate radial and axial damping rings, simplifying the overall mounting arrangement.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Object-affected harmful factors

If elastomeric damping rings are used with low radial stiffness for vibration isolation, then vibration transmission is reduced, but reliability decreases due to creep, stress relaxation, and lubricant interaction over time

Engineering Contradiction:
Improvevibration transmissionVSAvoiddamping characteristic stability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent changes the material parameter from elastomeric to metallic material for the resilient support. This parameter change eliminates the problems of creep, stress relaxation, and lubricant softening that affect elastomeric materials, while maintaining the low radial stiffness required for vibration isolation through geometric design of the metallic structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The resilient support combines metallic material with geometric flexibility features (such as slots or curved structures) to create a composite structure that exhibits both the stability of metal and the flexibility needed for vibration isolation. This composite approach maintains consistent damping characteristics over time.

Inventive Principle:
Principle #40Composite materials

3Strength

If thin axial damping rings are used for axial to radial stiffness contribution, then radial stiffness is improved, but manufacturing precision requirements increase due to complex machining for precise location

Engineering Contradiction:
Improveradial stiffnessVSAvoiddamping ring location precision
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent merges the axial damping ring function into the integrated resilient support structure, eliminating the need for separate thin axial damping rings and their associated precise location grooves. The resilient support achieves axial to radial stiffness contribution through its integrated geometry rather than through precisely located separate components.

Inventive Principle:
Principle #5Merging (Combining)

4Stability of the object's composition

If radial damping rings with full grooves are used for reliable axial location, then positioning reliability is improved, but ease of manufacture decreases due to tight tolerances and difficult cleaning

Engineering Contradiction:
Improveaxial location stabilityVSAvoidgroove machining difficulty
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The resilient support structure provides both axial location and radial damping functions through its integrated design, eliminating the need for separate full grooves for axial location. The structure achieves reliable axial positioning through its geometry and connection to the bearing assembly without requiring difficult-to-machine and clean grooves.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces costs, simplifies installation, minimizes vibration transmission, and eliminates the need for high-speed balancing by maintaining consistent damping properties, ensuring effective vibration isolation and reduced mechanical instability.

Implementation Method 1

a resilient support formed from a metallic material and comprising inner and outer annular portions connected by a plurality of flexible members

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

the fluid pump being configured to supply fluid to the bearing for lubrication thereof

Methodology Applied
Scientific EffectLubrication: Lubrication

Implementation Method 3

means for supplying fluid to the slots to provide load-bearing damping films

Methodology Applied
Scientific EffectVibration damping: Damping

Data Source

PatentEP1891332B2Vacuum pump
Publication Date: 2014.12.17 EDWARDS LTD
  • EP1891332B2 patent drawingFigure 1
  • EP1891332B2 patent drawingFigure 2
  • EP1891332B2 patent drawingFigure 3~4

AI summary

A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in both radial and axial directions by a resilient support (80) comprising inner (86) and outer (88) annular portions connected by a plurality of flexible members (84), the resilient support (80) having a radial stiffness in the range from 50 to 500 N/mm.