Vacuum Pump Rotor Balance Correction Member
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Solution Overview
Problem
In turbo-molecular pumps used in semiconductor manufacturing, particles generated during process gas discharge accumulate in recessed portions of the rotor, leading to quality issues due to rebounding when internal chamber pressure fluctuates.
Innovation Solution
A vacuum pump design featuring a rotor balance correction member with a cover portion that covers the recessed portion, an inclined surface, and a communication path to prevent particle accumulation and rebounding, utilizing a balance ring and cover portion configuration to manage unbalance and facilitate gas exhaustion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a recessed portion is formed at the suction-port-side end surface of the rotor, then the rotor balance can be corrected, but particles accumulate in the recessed portion and rebound into the chamber
Solution Approach 1:
A rotor balance correction member is introduced as an intermediary component that covers the recessed portion of the rotor. This member includes a cover portion that seals the recessed area, preventing particles from accumulating inside while still allowing the balance correction function to work. The intermediary component thus mediates between the need for balance correction and the need to prevent particle accumulation.
Solution Approach 2:
The rotor balance correction system is segmented into multiple functional parts: the recessed portion for balance correction, the cover portion for particle prevention, and the rotor balance correction member as a separate assembly. This segmentation allows each component to perform its specific function independently - the recessed portion maintains rotor balance while the cover portion prevents particle accumulation.
2Object-generated harmful factors
If the recessed portion is covered to prevent particle accumulation, then particle rebound is reduced, but the balance correction function may be compromised
Solution Approach 1:
The rotor balance correction member is designed with multi-functionality, serving both as a cover to prevent particle accumulation and as a balance correction mechanism. The member includes both a cover portion for particle prevention and balance correction portions (first and second balance correction portions) that maintain rotor balance. This universal component simultaneously addresses both requirements without compromise.
3Object-generated harmful factors
If the cover portion is positioned to fully cover the recessed portion, then particle accumulation is prevented, but gas exhaust efficiency may be reduced
Solution Approach 1:
The cover portion is designed with local quality variations - it covers the recessed portion to prevent particle accumulation in specific areas, but includes communication paths that allow gas flow in other regions. The balance correction portions are strategically positioned to maintain balance while preserving gas exhaust pathways. This localized approach ensures particle prevention where needed while maintaining overall gas exhaust efficiency.
Data Source
AI summary
A vacuum pump comprises: a pump rotor rotatably driven by a motor and fastened to a shaft; a recessed portion formed at a suction-port-side end surface of the pump rotor; and a rotor balance correction member including a cover portion configured to cover the recessed portion.