Vacuum Pump Rotor Blade Thermal Insulation Design
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Solution Overview
Problem
In vacuum pumps used for semiconductor manufacturing and other applications, the deposition of reaction products on the drag pump mechanism can occur due to high sublimation temperatures, requiring periodic disassembly and cleaning, which is time-consuming and costly.
Innovation Solution
A vacuum pump design featuring a first rotor blade made of a lightweight material and a second rotor blade made of a high heat-resistant material, positioned downstream with a heat insulating portion between them, to reduce heat flow from the high-temperature downstream section to the upstream section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the downstream section is heated to high temperature to prevent deposition, then deposition prevention is improved, but heat flows to the upstream section causing overheating
Solution Approach 1:
A heat insulating portion is introduced as an intermediary element between the downstream and upstream sections. This heat insulating portion acts as a thermal barrier that prevents heat from the high-temperature downstream section from flowing to the upstream section, thereby allowing the downstream section to be heated to high temperature for deposition prevention while protecting the upstream section from overheating
Solution Approach 2:
The vacuum pump is segmented into distinct thermal zones by introducing heat insulating portions at specific locations. This segmentation creates thermal isolation between the downstream high-temperature region and the upstream low-temperature region, enabling independent temperature control of each section to simultaneously achieve deposition prevention and overheating avoidance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively maintains the downstream section at a high temperature while preventing overheating of the upstream section, thereby reducing the deposition of reaction products and minimizing the need for disassembly and cleaning.
Implementation Method 1
a heat insulating portion, to reduce the flow of heat into the first rotor blade from the second rotor blade
Data Source
AI summary
A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.