Vacuum Pump System with Segmented Screw and Roots Pumps
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Solution Overview
Problem
Vacuum pump systems face high energy consumption due to the need for large dimensions and continuous operation at high pumping speeds, leading to inefficient energy use during idle or holding times, and existing solutions offer limited reductions in energy consumption while risking pressure fluctuations and overcompression.
Innovation Solution
A vacuum pump system comprising a main screw pump and an auxiliary Roots, claw, or side channel pump, where the auxiliary pump operates at a lower pumping speed, connected in series with a non-return valve to prevent backflow, and both pumps share a common housing and drive motor, optimizing compactness and energy efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the vacuum pump system is designed with large dimensions and high pumping speed to achieve short pump-down times, then the pump-down time is reduced, but the energy consumption increases significantly during idle and holding times
Solution Approach 1:
The vacuum pump system is segmented into multiple pump stages with different pumping speeds. A first vacuum pump with high pumping speed handles the pump-down phase, while a second vacuum pump with lower pumping speed maintains vacuum during idle and holding times. This segmentation allows each pump to operate optimally for its specific function, reducing overall energy consumption during extended operation.
Solution Approach 2:
The system dynamically switches between different pump configurations based on operational requirements. During pump-down, both pumps operate in parallel to achieve maximum pumping speed. During idle and holding times, only the lower-speed pump operates, adapting the system's pumping capacity to match the actual demand and minimize energy waste.
2Use of energy by moving object
If the pump speed is reduced during idle or holding time to save energy, then energy consumption decreases, but the pump-down time increases when the chamber needs to be evacuated again
Solution Approach 1:
The higher-speed vacuum pump remains in a standby state or operates at minimal capacity during idle and holding times, maintaining readiness to provide full pumping capacity immediately when needed. This preliminary positioning of the system ensures that when evacuation is required, the full pumping power is available without delay, while still conserving energy during non-critical periods.
3Productivity
If a single high-speed vacuum pump is used to maintain maximum pumping capacity, then the pumping performance is optimized, but the device complexity and cost increase
Solution Approach 1:
Instead of using a single high-speed pump, the system is segmented into multiple pump stages with different capabilities. This segmentation allows the use of simpler, lower-speed pumps for maintenance phases while reserving high-speed pumps for pump-down phases, thereby reducing overall system complexity and cost while maintaining the required pumping performance when needed.
4Reliability
If the vacuum pump operates continuously at high speed to maintain target pressure, then pressure stability is ensured, but the energy consumption increases during holding time
Solution Approach 1:
The system dynamically adjusts which pump operates based on the operational phase. During holding time when pressure stability is required, the lower-speed pump suffices for maintaining pressure, reducing energy consumption. During pump-down phases when rapid evacuation is needed, the high-speed pump is activated to meet the demanding performance requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures maximum pumping capacity while significantly reducing energy consumption, minimizing pressure fluctuations, and allowing for a compact, cost-effective design that maintains performance during varying operating states.
Implementation Method 1
A non-return valve is arranged in the outlet area of the main vacuum pump, in the direction of flow, before the outlet of the auxiliary vacuum pump opens into the outlet area
Data Source
Figure 1
AI summary
A vacuum pump system for evacuating a chamber, in particular a lock chamber or process chamber, comprises a main vacuum pump (12) preferably designed as a screw pump. An inlet (30) of the main vacuum pump (12) is connected to the chamber that is to be evacuated. An auxiliary vacuum pump (24), especially a Roots pump, is disposed in the pumping direction of the main vacuum pump (12). An outlet zone (32) of the main vacuum pump (12) is connected to a main outlet (34) and to an inlet (38) of the auxiliary vacuum pump. Furthermore, an outlet (40) of the auxiliary vacuum pump is connected to the main outlet (34).