Vacuum Pump Temperature Control for Sensor Failure Protection
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Solution Overview
Problem
Existing vacuum pump systems face overheating and overcooling issues due to abnormalities in temperature sensors controlling heaters or water-cooling solenoid valves, leading to impaired pump function and loss of maintenance data, which complicates maintenance and operation.
Innovation Solution
A vacuum pump system with a temperature control mechanism that repeatedly cycles the temperature between upper and lower limits, incorporating a specified time frame to detect abnormalities in the temperature sensor system, allowing for software-based control to forcibly adjust the heater or cooling device and notify issues without additional monitoring sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the base portion temperature is kept high to prevent product accumulation, then product deposition is reduced, but the electronic circuit may exceed limit temperature and be destroyed
Solution Approach 1:
The temperature control system is segmented into multiple independent temperature sensors positioned at different locations (base portion and electronic circuit proximity) to independently monitor different thermal zones, allowing differentiated control responses for each zone
Solution Approach 2:
A microprocessor-based control system acts as an intermediary between temperature sensors and heating/cooling actuators, processing temperature data and implementing control logic to balance product deposition prevention with electronic circuit protection
2Temperature
If a temperature sensor system is used to control heater and cooling device, then temperature management is achieved, but sensor abnormalities cause overheating or overcooling
Solution Approach 1:
The system implements feedback control by continuously monitoring temperature sensor readings and adjusting heater/cooling device operation accordingly, with abnormality detection feedback that triggers alerts when sensor readings indicate faulty conditions
Solution Approach 2:
The control system performs preliminary abnormality detection and validation checks on temperature sensor readings before acting on them, identifying sensor failures early and triggering protective measures before dangerous temperature excursions occur
3Measurement precision
If additional monitoring sensors are added to detect temperature sensor abnormalities, then detection capability is improved, but device complexity increases
Solution Approach 1:
The existing temperature sensors are made multi-functional by programming the microprocessor to detect both normal temperature control signals and abnormality patterns from the same sensor inputs, eliminating the need for separate monitoring sensors
Solution Approach 2:
The temperature control system performs self-diagnosis by monitoring its own sensor readings for abnormal patterns, using the existing sensor infrastructure to detect sensor failures without external monitoring equipment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures safe operation of the pump by preventing overheating and overcooling, allowing for continuous operation and timely notification of temperature sensor abnormalities, eliminating the need for separate monitoring sensors.
Implementation Method 1
a heater or an annular water cooling pipe is wrapped around an outer circumference of a base portion or the like of the turbomolecular pump... the base portion is heated by the heater... to keep the temperature of the base portion in a constant range of high temperatures
Implementation Method 2
an annular water cooling pipe is wrapped around an outer circumference of a base portion or the like of the turbomolecular pump... the base portion is cooled by the water cooling pipe when the temperature of the base portion exceeds a predetermined temperature
Data Source
AI summary
A vacuum pump and a temperature control device are capable of preventing, with a simple configuration, overheating and overcooling of a pump that are caused due to abnormality in a temperature sensor used to control a heater or a water-cooling solenoid valve that is provided to prevent the deposition of products. Problems such as overheating and overcooling of a heater can be avoided in a case where a temperature sensor system fails and consequently the measured temperature continues to be constant between the upper limit and the lower limit. TMS function controls the measured temperature of the temperature sensor to a target temperature. Thus, if an application such as a target to be heated or a heater capacity is identified, the same cycles of turning ON/OFF of the heater or the water-cooling solenoid valve are repeated, and the upper limit of the time in which the ON/OFF state is sustained continuously is determined. An allowed time considering a margin is provided for this upper limit, and the ON/OFF state is changed so that the ON state or the OFF state is not continuously sustained beyond the allowed time.