Vacuum Pump Side Cover Thermal Insulation Design
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Solution Overview
Problem
In vacuum pump apparatuses used in semiconductor manufacturing, the heat from the pump casing can transfer to the motor and gear housings, causing a decrease in temperature within the rotor chamber, which can lead to the solidification of by-products and subsequent pump failure.
Innovation Solution
The vacuum pump apparatus incorporates a side cover with an integrally-formed structure that includes a narrow portion with a smaller cross-sectional area, reducing heat transfer from the pump casing to the motor and gear housings. Additionally, a heater is arranged within the side cover to maintain a high temperature within the rotor chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heater is provided on the pump casing to heat the rotor chamber, then the temperature in the rotor chamber is maintained to prevent solidification of by-products, but heat is transferred to the motor housing and gear housing causing temperature drop in the rotor chamber
Solution Approach 1:
The side cover is divided into three distinct portions (inner wall portion, narrow portion, outer wall portion) with different cross-sectional areas. The narrow portion specifically has a smaller cross-sectional area to reduce heat transfer, while the inner wall portion maintains heating function. This segmentation allows different regions to serve different thermal functions simultaneously.
Solution Approach 2:
Different portions of the side cover are designed with different thermal properties. The narrow portion acts as a thermal barrier with reduced heat conduction, while the inner wall portion receives heater contact for localized heating. This local differentiation of thermal characteristics resolves the contradiction between maintaining temperature and preventing heat loss.
2Reliability
If a high-power heater is used to maintain temperature in the rotor chamber, then solidification of by-products is prevented, but more electric power is consumed and energy-saving operation cannot be achieved
Solution Approach 1:
The narrow portion, which would normally be considered a structural constraint, is converted into a beneficial thermal barrier. By designing this narrow portion with smaller cross-sectional area, the patent transforms potential heat loss into a useful insulation effect, reducing the energy required for heating while maintaining reliability.
Solution Approach 2:
The cross-sectional area parameter of the side cover is changed in the narrow portion to optimize thermal performance. This parameter modification reduces heat transfer coefficient, thereby lowering the power requirement for the heater while maintaining the necessary temperature in the rotor chamber for reliable operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively maintains a high temperature within the rotor chamber, preventing the solidification of by-products and ensuring stable operation of the vacuum pump apparatus while also preventing overheating of the bearings.
Implementation Method 1
a heater is provided on an outer surface of the pump casing to heat the rotor chamber
Implementation Method 2
a narrow portion with a smaller cross-sectional area, reducing heat transfer from the pump casing to the motor and gear housings
Data Source
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AI summary
A vacuum pump apparatus capable of preventing a decrease in temperature of a pump casing due to heat transfer, and capable of maintaining a high temperature in a rotor chamber is disclosed. A side cover is provided between a pump casing and a motor housing. The side cover includes an inner wall portion forming an end surface of the rotor chamber, an outer wall portion located outwardly of the inner wall portion, and a narrow portion located between the inner wall portion and the outer wall portion. The inner wall portion, the outer wall portion, and the narrow portion are an integrally-formed structure, and the narrow portion has a cross-sectional area smaller than cross-sectional areas of the inner wall portion and the outer wall portion.