Vacuum Pump Single Housing Differential Pumping

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Solution Overview

Problem

Existing vacuum pump systems with double housings are costly, complex, and prone to leaks due to increased components and additional space requirements, which complicates gas supply and reduces vacuum tightness.

Innovation Solution

A compact vacuum pump design with a single housing that integrates pump-active stator structures and incorporates a permanent magnet bearing, reducing the number of components and flange connections, along with a system of interconnected vacuum chambers for differential pumping, and features a seal arrangement with an annular channel to minimize pressure difference and detect leaks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a double housing is used to enclose rotor/stator area and drive/bearing area, then the pump can perform differential pumping, but the number of components increases, manufacturing cost increases, and vacuum tightness decreases

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidnumber of housing components

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines the rotor/stator housing and drive/bearing housing into a single integrated housing structure. This merging eliminates the need for multiple housing components, flange connections, and seals between housings, thereby reducing device complexity while maintaining differential pumping capability through internal partitioning of the single housing.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If a double housing is used, then the pump can perform differential pumping, but manufacturing cost and assembly cost increase significantly

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidmanufacturing and assembly cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent integrates multiple housing functions into a single housing component, eliminating the need for separate manufacturing and assembly of multiple housing parts. This reduces both manufacturing cost (fewer components to produce) and assembly cost (fewer components to assemble and align), while the single housing can still accommodate differential pumping through internal design features.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If multiple housing components are used, then the pump can perform differential pumping, but the risk of virtual leaks increases

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidvacuum tightness

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent uses a single housing structure to eliminate multiple flange connections and seals between housing components. By merging the housings, the number of potential leak paths is dramatically reduced, thereby improving vacuum tightness and reliability while still enabling differential pumping through the pump's internal structure.

Inventive Principle:

Principle #5Merging (Combining)

4Adaptability or versatility

If a double housing is used, then the pump can perform differential pumping, but additional space is required, complicating gas supply

Engineering Contradiction:

Improvedifferential pumping capabilityVSAvoidhousing space requirement

Core Design Contradiction:

Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

The patent consolidates the housing volume into a single structure, eliminating the space required for multiple housing components, flange connections, and associated sealing elements. This merging reduces the overall housing volume and simplifies gas supply routing, while the single housing can still accommodate multiple vacuum chambers for differential pumping.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves higher vacuum tightness, lower ultimate pressures, and reduced manufacturing and assembly costs, while allowing for easy maintenance and adaptability, with fewer components and simpler gas supply, enhancing the efficiency and reliability of vacuum systems.

Implementation Method 1

designing one of the bearing means as a permanent magnet bearing and thus supporting a shaft end in a rotatable manner

Methodology Applied

Scientific EffectMagnetic bearing: Maglev

Implementation Method 2

Vacuum pump with a housing (2), with a rotor (4), which has a shaft (4) and pump-active rotor structures (5), a stator (6) having pump-active stator structures (6)

Methodology Applied

Scientific EffectVacuum pumping: Pump

Data Source

PatentEP1852613B1Vacuum pump with casing

Publication Date: 2019.02.27 PFEIFFER VACUUM GMBH

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AI summary

The invention relates to a vacuum pump (1) with a housing (2), a rotor having a shaft (4) and pump-active rotor structures (5), a stator having pump-active stator structures (6), bearing means (8) and drive means (9). In order to achieve a more compact design with fewer components, it is proposed that the housing of the vacuum pump, which serves to hold the pump-active stator structures, has at least one vacuum chamber (20, 21, 31, 32, 33).