Vacuum Pump Startup Sequence for By-Product Suppression
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The introduction of inert gas into vacuum pump apparatuses to suppress by-product formation leads to increased power consumption and potential stagnation of rotational speed, resulting in prolonged startup times and failure to reach rated rotational speed.
Innovation Solution
A vacuum exhaust method and system that gradually increase the rotational speed of the vacuum pump apparatus to a stable speed before introducing inert gas, utilizing a bypass line for initial inert gas introduction at a low flow rate and subsequent higher flow rate introduction once stable speed is reached.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If inert gas is introduced into the vacuum pump apparatus to suppress by-product formation, then by-product formation is suppressed, but power consumption increases and rotational speed stagnates
Solution Approach 1:
The patent applies preliminary action by increasing the rotational speed to a stable speed before introducing inert gas. This preliminary speed increase ensures the pump is already operating efficiently when the inert gas is introduced, preventing rotational speed stagnation and reducing the overall amount of inert gas needed, thereby suppressing by-product formation without excessive power consumption.
Solution Approach 2:
The patent changes the parameter of inert gas flow rate dynamically. It introduces inert gas at a first flow rate (including zero) during the speed increase phase, then switches to a second flow rate (larger than the first) after stable speed is reached. This parameter change optimizes both by-product suppression and power consumption by matching inert gas introduction to the pump's operational state.
2Object-generated harmful factors
If inert gas is introduced into the vacuum pump apparatus to suppress by-product formation, then by-product formation is suppressed, but startup time increases
Solution Approach 1:
The patent performs the speed increase to stable speed as a preliminary action before inert gas introduction. This sequencing allows the pump to reach optimal operating conditions quickly without the drag of continuous inert gas introduction during startup, thereby reducing startup time while still achieving by-product suppression once the pump is running.
Solution Approach 2:
The patent uses periodic action by introducing inert gas in two distinct phases: first at a low flow rate (including zero) during startup, then at a higher flow rate after stable speed is reached. This periodic introduction pattern minimizes the time inert gas interferes with startup while ensuring by-product suppression during steady operation.
3Object-generated harmful factors
If inert gas is introduced into the vacuum pump apparatus to suppress by-product formation, then by-product formation is suppressed, but rotational speed fails to reach rated speed
Solution Approach 1:
The patent applies preliminary action by ensuring the rotational speed reaches a stable speed (preferably rated speed) before significant inert gas introduction occurs. This preliminary speed establishment prevents the inert gas from interfering with the acceleration process, allowing the pump to reach and maintain rated rotational speed while still achieving by-product suppression.
Solution Approach 2:
The patent changes the inert gas flow rate parameter based on operational phase: using a first flow rate (including zero) during acceleration to minimize resistance to speed increase, then switching to a second flow rate (larger than the first) after stable speed is reached to suppress by-products without impeding rotational speed achievement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses by-product formation while minimizing power consumption, ensuring rapid startup and achieving rated rotational speed without unnecessary inert gas usage.
Implementation Method 1
a vacuum pump apparatus for exhausting a gas in a vacuum chamber
Implementation Method 2
a method of introducing an inert gas into the vacuum pump apparatus to dilute a concentration of the gas
Implementation Method 3
a gas heating step of heating the inert gas through an inert gas supply line connected to the vacuum pump apparatus
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A vacuum exhaust method capable of solving problems associated with an introduction of an inert gas while suppressing a formation of a by-product is disclosed. The vacuum exhaust method includes: an increasing step of increasing a rotational speed of the vacuum pump apparatus to a predetermined stable speed after starting the vacuum pump apparatus; and a gas introduction step of introducing an inert gas into the vacuum pump apparatus after the rotational speed of the vacuum pump apparatus reaches the stable speed.