Vacuum Pump Stator Column Pressure Difference Relaxing Mechanism
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Solution Overview
Problem
Conventional vacuum pumps face issues with pressure differences in the exhaust path, leading to uneven flow of purge gas, which affects temperature measurement accuracy and causes product deposition on rotor blades due to imbalanced gas flow.
Innovation Solution
The design incorporates a pressure-difference relaxing mechanism with a first annular gas channel and a second annular gas channel, featuring varying sectional areas and multiple outlet ports, along with a groove-shaped channel and partition walls to ensure uniform gas flow and reduce pressure differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a small sectional area exhaust path is used, then the vacuum pump structure is compact, but a large pressure difference is generated between the outlet port vicinity and the opposite side
Solution Approach 1:
The exhaust path is divided into multiple segments by providing multiple outlet ports around the circumference of the stator column. This segmentation allows the total exhaust flow to be distributed across multiple channels, reducing the pressure difference in each individual path while maintaining a compact overall structure.
Solution Approach 2:
The patent introduces a pressure-difference relaxing mechanism with varying sectional area along the exhaust path. The channel cross-section is enlarged at specific locations where pressure difference is highest, creating local quality changes that relax the pressure gradient without increasing the overall pump volume significantly.
2Measurement precision
If purge gas flow rate is increased to maintain gas composition around temperature sensor, then measurement accuracy is improved, but flow imbalance occurs in the exhaust path
Solution Approach 1:
Multiple outlet ports segment the exhaust flow, allowing purge gas to distribute more evenly throughout the exhaust path. This prevents flow imbalance and ensures stable gas composition around the temperature sensor without requiring excessive purge gas flow rates.
Solution Approach 2:
The pressure-difference relaxing mechanism creates more uniform pressure distribution along the exhaust path, establishing equipotential conditions that promote balanced gas flow. This ensures consistent gas composition around the temperature sensor while maintaining overall flow stability.
3Device complexity
If purge gas flow is insufficient in certain areas, then device complexity is reduced, but process gas intrusion causes product deposition on rotor blade
Solution Approach 1:
The exhaust path is segmented into multiple outlet ports, which naturally distributes purge gas flow to cover all critical areas including the rotor blade periphery. This segmentation ensures adequate gas flow without requiring complex additional purge supply mechanisms.
Solution Approach 2:
The pressure-difference relaxing mechanism is passively designed into the exhaust path geometry itself, utilizing the existing gas flow to create the necessary pressure distribution. This self-service approach prevents product deposition without adding active control systems or complex purge mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for stable gas composition around the temperature sensor, enhancing measurement accuracy and preventing product deposition by ensuring uniform gas flow and reducing pressure differences in the exhaust path.
Implementation Method 1
a pressure-difference relaxing mechanism which relaxes the pressure difference generated in the first annular gas channel is included
Implementation Method 2
allowing the outlet port and an exit of the exhaust mechanism to communicate with each other
Data Source
AI summary
A vacuum pump and a stator column wherein partition walls from an outer peripheral surface of the stator column toward an inner periphery of a rotor blade are provided at two spots, and a groove-shaped channel in a circumferential direction is provided. A sectional area of the channel changes in the circumferential direction. As a result, the pressure difference between a front and a rear of the partition wall on a downstream side is made uniform regardless of a location, and a flowrate of the gas passing through a gap between the partition wall on the downstream side and the inner peripheral surface of the rotor blade is made uniform regardless of the location. The change in the sectional area is achieved either by changing a depth of the groove-shaped channel or by changing an interval between the partition walls at the two spots.