Vacuum Pump Stator Through-Holes for Gas Flow Uniformity
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Solution Overview
Problem
Existing vacuum pumps, such as those with turbo-molecular and Holweck stages, suffer from uneven gas flow rates through spiral grooves due to through-holes that only penetrate some grooves, leading to increased suction-side pressure and reduced exhaust performance.
Innovation Solution
A vacuum pump design with a cylindrical stator featuring alternately formed screw grooves and threads, where through-holes communicate with screw grooves and are positioned to ensure equal or greater circumferential dimensions than the outer peripheral surface region facing the suction port, and a gas path guiding inflow gas to screw grooves, enhancing gas flow uniformity across all grooves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If through-holes are formed to penetrate only some of the spiral grooves, then the structure is simpler, but the gas flow rate becomes uneven among grooves and suction-side pressure increases
Solution Approach 1:
The patent applies local quality by making through-holes penetrate all spiral grooves uniformly rather than selectively, ensuring each groove receives equal gas flow. This uniform penetration pattern addresses the uneven flow distribution while maintaining manufacturing feasibility through a systematic design approach.
Solution Approach 2:
The patent achieves equipotentiality by ensuring all spiral grooves have equivalent access to gas supply through uniformly distributed through-holes. This creates equal flow conditions across all grooves, balancing the gas distribution and preventing pressure buildup at the suction side.
2Productivity
If through-holes penetrate all screw grooves, then gas flow uniformity improves, but the structural complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the gas supply function into multiple through-holes distributed across the stator, with each through-hole serving specific spiral grooves. This modular approach achieves uniform gas distribution while keeping the overall structure manageable through systematic repetition of the through-hole pattern.
3Quantity of substance
If suction-side pressure increases, then the pump can handle higher gas loads, but exhaust performance deteriorates
Solution Approach 1:
The patent applies continuity of useful action by ensuring continuous and uniform gas flow into all spiral grooves through the through-holes. This prevents flow interruptions and pressure imbalances, maintaining efficient exhaust performance while handling the gas load through sustained, evenly distributed flow across all grooves.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves exhaust performance by ensuring uniform gas flow into all screw grooves, reducing suction-side pressure and enhancing overall pump efficiency.
Implementation Method 1
a cylindrical stator configured such that a plurality of screw grooves and a plurality of screw threads are alternately formed in an inner peripheral surface circumferential direction
Implementation Method 2
a first suction port provided on an upstream side of the first pump stage; and a second suction port provided on an downstream side of the first pump stage
Data Source
AI summary
One or more through-holes communicating with one or more of the plurality of screw grooves are formed at the cylindrical stator, a total of circumferential dimensions of the one or more through-holes formed at the cylindrical stator is set at equal to or greater than a circumferential dimension of an outer peripheral surface region of the cylindrical stator facing the second suction port, and a gas path through which inflow gas through the second suction port is guided to a screw groove is provided, the one or more through-holes penetrating through the screw groove and the screw groove being apart from the region facing the second suction port.