Dual-Sensor Vacuum Pump Temperature Control for Stable Gas Flow

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Solution Overview

Problem

Existing vacuum pumps face limitations in temperature management of the gas flow path due to the distance between temperature sensors and cooling/heating means, leading to overshoots, undershoots, and measurement errors, which restrict the stable operation of gas flow rates.

Innovation Solution

A vacuum pump design with two temperature sensors, one closer to the gas flow path and one closer to the temperature adjusting means, allows for precise control of the gas flow path temperature by the control apparatus, minimizing overshoots and undershoots, and reducing temperature measurement errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the temperature sensor is installed closer to the gas flow path, then the temperature measurement accuracy is improved, but the response time increases and overshoot/undershoot occurs more readily

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidresponse time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent divides the temperature sensing function into two separate sensors: one positioned near the gas flow path for accurate temperature measurement, and another near the cooling means for fast response. This segmentation allows each sensor to fulfill its specific role optimally without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The temperature sensor near the cooling means acts as an intermediary that detects cooling system temperature changes and transmits this information to the control apparatus, which then adjusts cooling water flow to maintain gas flow path temperature within permissible ranges.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of time

If the temperature sensor is installed closer to the cooling means, then the response time is improved, but the temperature measurement error increases

Engineering Contradiction:
Improveresponse timeVSAvoidtemperature measurement accuracy
Core Design Contradiction:
Loss of timeVSMeasurement precision

Solution Approach 1:

The patent divides the temperature sensing function into two separate sensors: one positioned near the gas flow path for accurate temperature measurement, and another near the cooling means for fast response. This segmentation allows each sensor to fulfill its specific role optimally without compromise.

Inventive Principle:
Principle #1Segmentation

3Device complexity

If a single temperature sensor is used, then the device complexity is reduced, but the temperature control precision deteriorates

Engineering Contradiction:
Improvenumber of temperature sensorsVSAvoidtemperature control precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent divides the temperature sensing function into two separate sensors: one positioned near the gas flow path for accurate temperature measurement, and another near the cooling means for fast response. This segmentation allows each sensor to fulfill its specific role optimally without compromise.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The control apparatus receives signals from both temperature sensors and uses feedback control to adjust the cooling water solenoid valve, maintaining gas flow path temperature within permissible ranges while responding to temperature changes efficiently.

Inventive Principle:
Principle #23Feedback

4Productivity

If the gas flow rate increases, then the productivity is improved, but the temperature control stability deteriorates

Engineering Contradiction:
Improvegas flow rateVSAvoidtemperature stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The control apparatus receives signals from both temperature sensors and uses feedback control to adjust the cooling water solenoid valve, maintaining gas flow path temperature within permissible ranges while responding to temperature changes efficiently.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts cooling water flow based on real-time temperature readings from both sensors, allowing the vacuum pump to maintain stable temperature control across varying gas flow rates and operational conditions.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables stable gas flow rates by effectively managing temperature fluctuations in the gas flow path, ensuring the temperature remains within permissible limits, thereby reducing operational restrictions.

Implementation Method 1

a first temperature sensor arranged at a position closer to the gas flow path than the temperature adjusting means

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a second temperature sensor arranged at a position closer to the temperature adjusting means than the gas flow path

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

a control apparatus which controls the temperature adjusting means based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12504014B2Vacuum pump
Publication Date: 2025.12.23 EDWARDS JAPAN
  • US12504014B2 patent drawing
  • US12504014B2 patent drawing
  • US12504014B2 patent drawing

AI summary

To obtain a vacuum pump which appropriately performs temperature management of a gas flow path and reduces restrictions on a gas flow rate attributable to the temperature management. A cooling tube performs temperature adjustment of a gas flow path. A first temperature sensor is arranged at a position closer to the gas flow path than the cooling tube, a second temperature sensor is arranged at a position closer to the cooling tube than the gas flow path, and a control apparatus controls, based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor, (an on-off valve of) the cooling tube so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature.