Vacuum Pump Temperature Zoning to Prevent Gas Solidification
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Solution Overview
Problem
Existing vacuum pumps used in semiconductor manufacturing face issues with gas deposition due to sublimation at high vacuum, leading to reduced strength of rotor and stator blades and performance degradation of electric parts, as existing temperature control methods are inadequate.
Innovation Solution
The vacuum pump incorporates separate temperature regulation for the turbo-molecular and thread-groove mechanisms using first and second temperature regulating means, along with heat insulating means and cooling structures, to maintain optimal temperatures and prevent gas solidification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If temperature control is implemented to suppress gas solidification, then gas deposition is reduced, but the complexity of the system increases due to additional temperature regulating means
Solution Approach 1:
The vacuum pump is divided into two independent temperature control systems: one for the turbo-molecular-pump mechanism and another for the thread-groove-pump mechanism. Each mechanism has its own temperature regulating means (first and second temperature regulating means respectively), allowing independent temperature control without interfering with the other system. This segmentation enables precise control of gas temperature in each section to prevent solidification while managing system complexity through modular design.
2Productivity
If heating is applied to the thread-groove-pump mechanism to prevent gas solidification, then gas transfer is improved, but the strength of rotor and stator blades decreases at extremely high temperatures
Solution Approach 1:
The patent implements separate temperature regulation for the thread-groove-pump mechanism, using the second temperature regulating means to control the temperature parameter within an optimal range. This prevents gas solidification by maintaining sufficient temperature while avoiding excessively high temperatures that would weaken the rotor and stator blades. The parameter change approach allows dynamic adjustment of temperature to balance gas transfer efficiency with structural integrity.
3Reliability
If cooling is applied to the turbo-molecular-pump mechanism to prevent overheating, then electric part performance is maintained, but gas solidification may occur at low temperatures
Solution Approach 1:
The first temperature regulating means controls the temperature parameter of the turbo-molecular-pump mechanism to maintain an optimal range. This prevents overheating that would damage electric parts while avoiding excessive cooling that would cause gas solidification. The parameter change approach enables precise temperature maintenance, balancing the protection of electric components with prevention of gas deposition.
4Measurement precision
If separate temperature regulation is implemented for both mechanisms, then temperature control precision is improved, but the device complexity increases
Solution Approach 1:
The system is segmented into two independent temperature control loops, each with its own temperature regulating means positioned at specific locations (first temperature regulating means for turbo-molecular-pump, second for thread-groove-pump). This segmentation achieves precise temperature control for each mechanism separately, improving overall temperature control precision while managing complexity through modular, distributed architecture.
Solution Approach 2:
Temperature regulating means act as intermediary components between the power supply and the pump mechanisms. These intermediaries (first and second temperature regulating means) precisely control the temperature parameter for each mechanism independently, enabling fine-tuned temperature management without direct complex interaction between the two systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows precise temperature control of each pump mechanism, preventing gas solidification and maintaining the strength of rotor and stator blades, while ensuring the electric parts and motor operate efficiently.
Implementation Method 1
first temperature regulating means configured to regulate cooling of the turbo-molecular-pump mechanism
Implementation Method 2
second temperature regulating means configured to regulate heating of the thread-groove-pump mechanism
Implementation Method 3
heat insulating means provided between the stator of the turbo-molecular-pump mechanism and the stator of the thread-groove-pump mechanism
Data Source
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AI summary
A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.