Turbo Molecular Vacuum Pump Anti-Twist Connection

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Solution Overview

Problem

Existing vacuum pump arrangements, such as turbomolecular pumps, face challenges in securely attaching the pump to a vacuum chamber due to high rotor speeds and resulting torque, which can cause the pump housing to twist, leading to potential damage and increased complexity and cost in assembly.

Innovation Solution

The vacuum pump arrangement incorporates a connecting element with at least one tooth or rib-like structure that is pressed into an intermediate element or engages with a receiving recess to prevent twisting, allowing for secure attachment with a single fixing element, simplifying the connection and assembly process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If clamps are used to attach the vacuum pump to the vacuum chamber housing, then the pump can be connected to the vacuum chamber, but the pump housing can twist relative to the vacuum chamber housing under high torque, potentially damaging the housing

Engineering Contradiction:
Improveattachment strengthVSAvoidhousing damage from twisting
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an intermediate element (insert ring) as a mediator between the connecting element (clamp) and the counter flange. This intermediate element absorbs and distributes the high torque forces, preventing direct transmission of twisting forces to the vacuum chamber housing. The intermediate element acts as a buffer that protects the housing from damage while still enabling secure attachment of the pump.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If two screws spaced apart are used to secure the connecting element against rotation, then rotation is prevented, but the assembly becomes more complex and expensive

Engineering Contradiction:
Improveanti-rotation securityVSAvoidnumber of fixing elements
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The intermediate element serves as an intermediary that integrates the anti-rotation function into its structure. Instead of requiring separate screws to prevent rotation of the connecting element, the intermediate element's design inherently provides anti-rotation capability through its engagement features with the connecting element, thereby reducing the number of additional fixing elements needed.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent merges multiple functions into the intermediate element: it provides both the anti-rotation mechanism and the structural connection between the clamp and counter flange. By combining these functions into a single component rather than using separate screws for each function, the overall device complexity is reduced while maintaining reliability.

Inventive Principle:
Principle #5Merging (Combining)

3Strength

If clamps are used to connect the vacuum pump, then the pump can be attached to the vacuum chamber, but the assembly effort and cost increase due to complex connection requirements

Engineering Contradiction:
Improveconnection reliabilityVSAvoidassembly effort
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The intermediate element simplifies the assembly process by serving as a pre-fabricated connection component that integrates multiple functions. Rather than requiring complex multi-step assembly of separate clamps, screws, and anti-rotation devices, the intermediate element can be installed as a single component that provides both structural support and anti-rotation capability, thereby reducing assembly effort.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentEP2913534B1Vacuum pump assembly
Publication Date: 2021.05.19 PFEIFFER VACUUM GMBH
  • EP2913534B1 patent drawingFigure 1~3
  • EP2913534B1 patent drawingFigure 2
  • EP2913534B1 patent drawingFigure 4~5

AI summary

PROBLEM TO BE SOLVED: To provide a vacuum pump device and a connection element capable of ensuring simpler connection assembly of vacuum pumps with simpler structure at a low cost and ensuring highly reliable protection against distortion of connection elements.SOLUTION: A turbo molecular vacuum pump device comprises a vacuum pump 38 that includes one rotor, one stator, and one housing, the vacuum pump 38 is connectable to a vacuum chamber 40 via at least one connection element 18, during connection, the connection element 18 can be engaged with a pump flange provided in a pump housing and can be fixed to a counter flange 20 provided in the vacuum chamber 40, at least one tooth part 22 is provided on the connection element 18, and this tooth part 22 is pressed into the counter flange 20 or engaged with a storage recess provided in the counter flange 20 for protection against distortion when the connection element 18 is fixed to the counter flange 20.