Vacuum Pump Damper Structure for Twist Vibration Isolation
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Solution Overview
Problem
Existing vacuum pumps used in instruments like electron microscopes suffer from inadequate vibration isolation, leading to potential damage and functional issues due to high stiffness in twisting direction and high manufacturing costs associated with stainless bellows and O-rings.
Innovation Solution
A vacuum pump design featuring ring-shaped flanges with intermediate rings, O-rings, and circumferentially spread elastic members, which provide improved vibration isolation by reducing spring constants in both twisting and lateral directions, and prevent O-ring rupture through proper alignment and insulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If stainless bellows are used for vibration isolation between casing and inlet port part, then vibration reduction is achieved, but manufacturing cost increases and twisting direction stiffness is too high
Solution Approach 1:
The patent replaces expensive stainless bellows with a combination of inexpensive rubber O-rings and elastic members (such as rubber or plastic columns). This substitution dramatically reduces manufacturing cost while maintaining vibration isolation functionality, as the elastic members provide sufficient flexibility without requiring costly stainless steel construction.
Solution Approach 2:
The patent uses composite material structures combining rubber O-rings with elastic members made of materials like rubber or plastic. This composite approach provides effective vibration isolation in both axial and twisting directions, achieving performance comparable to stainless bellows at a fraction of the cost.
2Object-affected harmful factors
If stainless bellows are used for vibration isolation, then vibration reduction is achieved, but stiffness in twisting direction is too high
Solution Approach 1:
The patent applies different material properties to different parts of the connection structure. Rubber O-rings provide sealing and lateral flexibility, while elastic members (columns) provide axial flexibility. This local differentiation of material properties enables effective vibration isolation in twisting directions without the excessive stiffness inherent in stainless bellows.
Solution Approach 2:
The combination of rubber O-rings and elastic members creates a composite vibration isolation system that achieves superior twisting flexibility compared to stainless bellows. The rubber material inherently provides low stiffness in twisting directions, allowing vibrations to be isolated without resistance.
3Reliability
If O-rings are used for sealing between flanges, then airtightness is achieved, but O-rings may rupture due to misalignment and electrical noise propagation
Solution Approach 1:
The patent introduces intermediate rings as mediator components between the first and second flanges. These intermediate rings serve multiple functions: they provide precise positioning to prevent misalignment, act as electrical insulators to block noise propagation, and distribute sealing forces evenly to protect O-rings from rupture. This intermediary structure resolves the harmful effects while maintaining airtightness.
Solution Approach 2:
The positioning members and intermediate rings are designed to preemptively prevent misalignment before it can cause O-ring damage. By establishing proper alignment and electrical insulation in advance, the system cushions against potential harm to the O-rings and prevents electrical noise propagation before these issues can affect system reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances vibration isolation, reduces manufacturing costs, and prevents O-ring and elastic member damage by regulating flange misalignment and electrical noise propagation.
Implementation Method 1
a plurality of elastic members, each of the plurality of elastic member being disposed such that the plurality of elastic member are circumferentially spread both between the first flange and the at least one intermediate ring and between the at least one intermediate ring and the second flange
Implementation Method 2
O-rings, the O-rings being respectively disposed between the first flange and the at least one intermediate ring and between the at least one intermediate ring and the second flange
Data Source
AI summary
A vacuum pump and a damper for the vacuum pump are provided so as to increase vibration isolation in a twisting direction with a simple structure and prevent rupture of an O-ring and an elastic member by regulating a misalignment of flanges facing each other. Provided are a first flange and a second flange, each having a central opening, the flanges being shaped like rings opposed to each other; an O-ring and an intermediate ring that are disposed between the first flange and the second flange; O-rings disposed between the first flange and the intermediate flange and between the intermediate ring and the second flange; a plurality of elastic members that are disposed between the first flange and the second flange and are spread in the circumferential direction of central openings; and airtightness keeping means including positioning pins inserted into positioning holes sequentially provided on the first flange, the intermediate ring, and the second flange.