Vacuum Pumping System Power Conservation via Exhaust Staging
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Solution Overview
Problem
Vacuum pumping systems in industries like semiconductor processing and flat panel display manufacturing face high energy consumption when cycling between low and high vacuum pressures, particularly during the high vacuum phase where pumping arrangements continue to operate but are isolated from the enclosure.
Innovation Solution
A vacuum pumping system with a power conserving state that reduces energy consumption by having a first stage where one vacuum pumping arrangement evacuates the exhausts of others and a second stage where the exhausts are evacuated by an auxiliary vacuum chamber, thereby reducing pressure and energy usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vacuum pumping arrangements continue to operate during high vacuum phase, then vacuum level is maintained, but energy consumption increases
Solution Approach 1:
The system implements periodic operation by cycling between different pumping configurations. During high vacuum phase, pumps operate in isolation mode to maintain vacuum. During low vacuum phase, pumps operate in parallel to rapidly evacuate the chamber. This periodic switching optimizes energy consumption while maintaining vacuum reliability.
Solution Approach 2:
The pumping system is segmented into multiple independent pumping arrangements that can operate independently or in combination. Each pumping arrangement can be isolated from others using valve assemblies, allowing selective operation of individual pumps based on vacuum requirements, thereby reducing overall energy consumption while maintaining necessary vacuum levels.
2Productivity
If multiple vacuum pumping arrangements operate in parallel, then evacuation speed increases, but system complexity increases
Solution Approach 1:
Each pumping arrangement is designed to be multi-functional, capable of operating both in parallel with other pumps for rapid evacuation and in isolation for maintaining high vacuum. The valve assemblies provide universal connectivity, allowing any pump to serve multiple functions depending on system requirements, thereby managing complexity while maintaining productivity.
3Use of energy by stationary object
If pumping arrangements are isolated during high vacuum, then energy is conserved, but vacuum stability may be compromised
Solution Approach 1:
The system incorporates feedback control through valve assemblies that respond to vacuum level requirements. During high vacuum phase, sensors detect the vacuum level and trigger isolation valves to separate pumping arrangements, conserving energy while maintaining stability. The feedback mechanism ensures vacuum stability is preserved even when pumps operate in isolation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves a reduction in power consumption by approximately 10 to 20% by optimizing the pressure at the exhaust stages, allowing for more efficient operation and reduced energy usage during the high vacuum phase.
Implementation Method 1
a vacuum pumping system for evacuating an enclosure
Data Source
AI summary
A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.