Modular Vacuum Robot Platform With Inductive Power Coupling
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Solution Overview
Problem
Existing substrate transport systems in vacuum chambers face challenges in efficiently moving robots and substrates due to contamination risks and the need for complex wiring and power transmission within the vacuum environment.
Innovation Solution
The proposed solution involves a substrate transport assembly with a first base plate configured with linear drive components and power coupling components, featuring a plurality of rails and alignment features to create a structural platform within the vacuum chamber. This allows a robot drive to move linearly along the rails, minimizing contamination and eliminating the need for direct physical contact between the transport chamber and the robot enclosure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a robot drive moves directly within the vacuum chamber, then substrate transport can be performed, but contamination risks increase due to direct exposure to the vacuum environment
Solution Approach 1:
The system divides the vacuum chamber into separate functional zones using base plates that create isolated platforms. The robot drive operates on these segmented platforms rather than moving freely in the vacuum chamber, reducing contamination exposure while maintaining transport functionality.
Solution Approach 2:
Base plates with rails serve as intermediary structures between the vacuum chamber environment and the robot drive. These intermediaries provide a controlled interface that allows robot movement while protecting against direct contamination from the vacuum chamber.
2Ease of operation
If complex wiring and power transmission systems are installed in the vacuum chamber, then the robot drive can be powered and controlled, but the system complexity and contamination risks increase
Solution Approach 1:
The patent extracts power and control transmission components from the vacuum chamber environment by using induction coupling systems that transfer energy and signals through the chamber walls. This removes complex wiring from the vacuum environment while maintaining full operational control.
Solution Approach 2:
The system replaces mechanical wiring and direct electrical connections with induction coupling and wireless communication systems. This substitution eliminates the need for physical wire penetration into the vacuum chamber, reducing complexity and contamination risks.
3Adaptability or versatility
If modular base plate assemblies are used to create a structural platform, then the system becomes more adaptable and easier to assemble, but the device complexity increases
Solution Approach 1:
The base plate system is divided into modular assemblies that can be independently manufactured, tested, and assembled. Each base plate contains integrated rails and alignment features, creating self-contained modules that simplify the overall assembly process while providing configuration flexibility.
Solution Approach 2:
The patent combines multiple functions into each modular base plate assembly, including structural support, rail mounting, alignment features, and platform formation. This merging reduces the total number of separate components needed while maintaining adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces contamination risks and simplifies the power and communication infrastructure within the vacuum chamber, enabling efficient and reliable movement of robots and substrates while maintaining a sealed environment.
Implementation Method 1
a linear motor component configured to provide a magnetic field to move the robot drive along the plurality of rails
Implementation Method 2
a linear motor component configured to provide a magnetic field to move the robot drive along the plurality of rails
Implementation Method 3
a power coupling component configured to transfer power to another power coupling component on the robot drive, wherein the transfer of power is with induction
Data Source
AI summary
An apparatus including a first base plate, where the first base plate is configured to have at least one linear drive component and/or at least one power coupling component connected to a top side of the first base plate, where the first base plate is configured to be located inside a vacuum chamber; and a plurality of rails or transport guides on the top side of the first base plate. An end of the first base plate includes at least one alignment feature configured to align an end of the first base plate to an end of a second base plate. The first base plate is configured to provide, in combination with the second base plate, a structural platform inside the vacuum chamber for a robot drive to move in the vacuum chamber along the plurality of transport guides.