Vacuum Roller Heating via Induction Susceptor
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vacuum deposition systems face challenges in heating flexible substrates effectively due to outgassing issues, which affect layer properties, and current solutions like heated guide rollers require complex vacuum tight sealing and temperature regulation, leading to high friction and increased costs.
Innovation Solution
A roller device with an electrical heating device held at both ends, allowing for passive rotation driven by the substrate motion, providing efficient and controlled heating within a vacuum chamber without the need for complex sealing or additional heating devices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a heated guide roller is used to enhance outgassing of the substrate, then the layer properties are improved, but the device complexity increases due to vacuum tight sealing requirements and temperature regulation systems
Solution Approach 1:
The patent extracts the heating function from a complex mechanically sealed guide roller system and implements it through a simple susceptor material that is directly placed on the substrate. This eliminates the need for vacuum tight sealing and external temperature regulation systems while maintaining the outgassing enhancement benefit
Solution Approach 2:
The patent replaces the mechanical heating system (heated guide roller with seals and fluid circulation) with an electromagnetic induction heating system using a susceptor material. This substitution eliminates mechanical sealing requirements and simplifies the temperature control mechanism
2Temperature
If a heated guide roller with vacuum tight sealing is used, then substrate heating is achieved, but friction increases leading to operational difficulties
Solution Approach 1:
The patent removes the heated guide roller component entirely and replaces it with a susceptor material applied directly to the substrate. This extraction eliminates the friction problem associated with roller sealing surfaces while maintaining effective substrate heating through induction
Solution Approach 2:
The susceptor material on the substrate serves its own heating function through electromagnetic induction, eliminating the need for an external heated roller. The substrate essentially heats itself through the magnetic field interaction with the susceptor material
3Temperature
If oil or water/alcohol mixtures are used as heat transfer medium, then heating capability is provided, but additional heating and cooling devices are required increasing system complexity
Solution Approach 1:
The patent replaces the thermal fluid heat transfer system (oil or water/alcohol mixtures requiring pumps, heat exchangers, and cooling devices) with direct electromagnetic induction heating. This substitution eliminates the entire heat transfer medium circulation system and its associated complexity
Solution Approach 2:
The patent changes the heating method from indirect thermal conduction through heat transfer fluids to direct electromagnetic induction heating. This parameter change in the heating mechanism eliminates the need for heat transfer media and their associated control systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively heats flexible substrates, reducing outgassing issues and improving layer quality, while simplifying the system design and reducing costs by eliminating the need for complex temperature regulation and minimizing friction.
Implementation Method 1
an electrical heating device within the roller device, wherein the heating device comprises a first end and a second end, and wherein the electrical heating device is held at the first end and at the second end
Implementation Method 2
the roller device is passively driven and is configured to be driven by a motion of the flexible substrate only
Data Source
Figure 1~2
Figure 3a~4
Figure 5~7
AI summary
A deposition arrangement (100; 600) for depositing a material on a substrate (110; 640) is described. The deposition arrangement includes a vacuum chamber (120); a roller device (200; 300; 400; 500; 604) within the vacuum chamber (120); and an electrical heating device (61; 220; 320; 420; 520) within the roller device (200; 300; 400; 500; 604), wherein the heating device comprises a first end (250) and a second end (260), and wherein the heating device is held at the first end and at the second end. Also, a method for heating a substrate in a vacuum deposition arrangement is described.