Vacuum Fluid Routing Module for Chamber Pressure Isolation
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Solution Overview
Problem
Vacuum pump-down events in semiconductor processing tools can cause undesirable fluctuations in gas pressure conditions across multiple connected chambers, affecting the integrity and efficiency of the vacuum systems.
Innovation Solution
A fluid routing module with a restrictor module and bypass line, featuring multiple restrictors of varying diameters and valves, allows selective control of fluid flow to manage pressure changes independently in each chamber, minimizing interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a pump-down event is performed on one chamber connected to a common manifold, then the reduced gas pressure is established in that chamber, but highly undesirable fluctuations occur in other chambers connected to the same manifold
Solution Approach 1:
The patent divides the common vacuum system into separate controllable segments by introducing individual valve modules for each chamber. Each valve module can independently control the fluid path between a specific chamber and the common manifold, allowing isolated pump-down operations without affecting other chambers. This segmentation resolves the pressure fluctuation issue by preventing cross-chamber interference during vacuum operations.
Solution Approach 2:
The patent introduces valve modules as intermediary components between individual chambers and the common manifold. These valve modules act as mediators that can selectively open or close fluid paths, enabling controlled isolation of chambers during pump-down events. The intermediary valves prevent direct pressure transmission between chambers, thereby eliminating harmful pressure fluctuations in connected chambers.
2Device complexity
If multiple chambers are fluidly connected to a common manifold for simultaneous pumping, then the system complexity is reduced, but performing pump-down on one chamber affects conditions in other chambers
Solution Approach 1:
The patent transforms the static common manifold connection into a dynamic, controllable system by incorporating valve modules that can change the fluid path configuration based on operational requirements. The valves enable the system to dynamically switch between connected and isolated states, allowing flexible control over chamber interconnections. This dynamic capability maintains the simplified common manifold structure while adding the reliability needed to prevent cross-chamber pressure effects.
3Manufacturing precision
If a restrictor module is disposed along the fluid line to control flow, then pressure fluctuations are reduced, but the device complexity increases
Solution Approach 1:
The patent merges the restrictor function with the valve module by integrating flow restriction capabilities directly into the existing valve assembly. Rather than adding separate restrictor components, the design combines pressure control and flow regulation functions within a single integrated module. This merging approach achieves precise pressure control while minimizing the increase in device complexity by consolidating multiple functions into unified components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces or eliminates pressure fluctuations across connected chambers, enabling faster and more controlled pump-down events while maintaining vacuum conditions.
Implementation Method 1
a restrictor module disposed along the first fluid line between the first fluid inlet and the first fluid outlet, the restrictor module being configured to variably restrict a flow of fluid between the first fluid inlet and the first fluid outlet
Data Source
AI summary
A fluid routing module (104) for a vacuum pumping system (100), the fluid routing module (104) comprising: a first fluid inlet (110a); a first fluid outlet (114a); a first fluid line (200) coupled between the first fluid inlet (110a) and the fluid outlet (114a); and a restrictor module (212) disposed along the first fluid line (200) between the first fluid inlet (110a) and the first fluid outlet (114a), the restrictor module (212) being configured to variably restrict a flow of fluid between the first fluid inlet (110a) and the first fluid outlet (114a).