Vacuum Sensor Head Segmented Housing for Confocal Measurement

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Solution Overview

Problem

The existing optical measurement devices face challenges in achieving high accuracy measurements when the sensor head is positioned outside the vacuum chamber due to the large distance between the sensor head and the measurement object, and the deformation of the chamber under vacuum pressure, which affects measurement accuracy.

Innovation Solution

A sensor head with a housing that includes a first through hole communicating with the external vacuum, partitioning the optical path space into multiple sections to reduce pressure on the housing and minimize external light interference, allowing for accurate measurements within a vacuum environment without the need for adhesive materials, which reduces outgas generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the sensor head is arranged outside the vacuum chamber, then the chamber structure can be simpler, but the measurement accuracy decreases due to large distance between sensor head and measurement object

Engineering Contradiction:

Improvechamber structureVSAvoidmeasurement accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The sensor head housing is divided into multiple pressure zones using partition walls, creating a high-pressure side (communication with vacuum chamber) and a low-pressure side (communication with external environment). This segmentation allows the sensor head to be positioned close to the measurement object while maintaining structural integrity and measurement accuracy.

Inventive Principle:

Principle #1Segmentation

2Measurement precision

If the sensor head is arranged inside the vacuum chamber, then measurement accuracy improves, but the housing deforms due to vacuum pressure

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidhousing deformation

Core Design Contradiction:

Measurement precisionVSShape

Solution Approach 1:

The housing is segmented into multiple pressure zones using partition walls. The high-pressure side faces the vacuum chamber while the low-pressure side faces the external environment, balancing vacuum pressure and preventing housing deformation to maintain measurement accuracy.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The partition wall structure creates counterbalancing pressure distribution within the housing. By having one side exposed to vacuum pressure and the other to atmospheric pressure, the structural load is distributed and counteracted, preventing deformation of the housing.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

3Ease of manufacture

If adhesive materials are used to secure lenses, then assembly is easier, but outgas generation increases in vacuum environment

Engineering Contradiction:

Improveassembly easeVSAvoidoutgas generation

Core Design Contradiction:

Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The patent replaces adhesive bonding with mechanical fastening methods such as screw fittings or bayonet mounts to secure lenses and other optical components. This substitution eliminates organic adhesives that would outgas in vacuum, while maintaining secure assembly through precision mechanical interfaces.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Reliability

If the housing is made airtight, then internal components are protected, but pressure builds up in vacuum environment causing deformation

Engineering Contradiction:

Improvecomponent protectionVSAvoidhousing deformation

Core Design Contradiction:

ReliabilityVSShape

Solution Approach 1:

The housing is divided into sealed compartments by partition walls. Each compartment can be independently pressure-managed, allowing the high-pressure side to communicate with the vacuum chamber while the low-pressure side remains protected from vacuum pressure, preventing overall housing deformation.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables highly accurate optical measurements in a vacuum environment by reducing pressure on the sensor head housing and minimizing external light interference, maintaining precise measurement accuracy and layout required for confocal optical systems.

Implementation Method 1

The sensor head is provided with a housing, and a first lens arranged inside the housing. The housing includes a first through hole communicating with a space inside the housing.

Methodology Applied

Scientific EffectVacuum: Vacuum

Implementation Method 2

The sensor head is provided with a housing, and a first lens arranged inside the housing. The housing includes a second optical path space through which light passes.

Methodology Applied

Scientific EffectRefraction: Refraction

Data Source

PatentEP2902829B1Sensor head for optical measurement device capable of high accurate measurement in a vacuum environment

Publication Date: 2019.03.20 OMRON CORP

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AI summary

Sensor head used in an optical measurement device and capable of highly accurate measurement even in a vacuum environment. The sensor head is configured to connect to a controller via a member that transmits light. The sensor head includes a housing. The housing includes a plurality of through holes communicating with a space inside the housing. A plurality of optical elements (lenses, mirror) are located inside the housing by mounting means, the mounting means being provided with grooves such that the spaces between the optical elements communicates with a space inside the housing.