Vacuum Test Chamber Sensor Module with Pressure-Balancing Chamber
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Solution Overview
Problem
Conventional optical test systems face challenges with outgassing and mechanical loading of sensors due to vacuum conditions, leading to distorted test results and high costs.
Innovation Solution
A test system with a negative-pressure chamber surrounding the sensor's electronics, using a separate negative-pressure generator to counteract the vacuum pressure, preventing mechanical loading and outgassing by maintaining a controlled pressure differential.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the sensor is placed directly in the vacuum chamber to eliminate leadthroughs, then signal integrity is improved, but the sensor experiences mechanical deformation due to pressure difference
Solution Approach 1:
The sensor module is segmented into two parts: the sensor element itself and the electronics. The sensor is placed in the vacuum chamber while electronics remain outside, connected through a vacuum feedthrough. This segmentation allows the sensor to experience vacuum conditions for optimal performance while protecting electronics from vacuum damage.
Solution Approach 2:
A vacuum feedthrough acts as an intermediary component that allows electrical signals to pass from the sensor in the vacuum chamber to the electronics outside. This mediator maintains signal integrity while preventing direct mechanical stress on the sensor from pressure differential.
2Object-generated harmful factors
If electronics are kept outside the vacuum chamber to prevent outgassing, then test chamber purity is improved, but signal transmission becomes complex requiring vacuum leadthroughs
Solution Approach 1:
The electronics are extracted from the vacuum chamber environment and placed in the external environment. Only the essential sensor element remains in the vacuum chamber, minimizing outgassing sources while maintaining measurement capability.
Solution Approach 2:
A specialized vacuum feedthrough serves as an intermediary that enables signal transmission between the vacuum chamber and external electronics. This mediator component is specifically designed to maintain vacuum integrity while allowing electrical connectivity.
3Strength
If the sensor is made with higher strength to withstand pressure difference, then mechanical stability is improved, but manufacturing costs increase
Solution Approach 1:
The vacuum feedthrough acts as a mechanical intermediary that supports the sensor and distributes pressure loads. This allows the use of less robust, more cost-effective sensor designs while maintaining structural integrity under vacuum conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents sensor deformation and outgassing, ensuring accurate and reliable test results without increased costs.
Implementation Method 1
a vacuum is then created in the test chamber with a vacuum generator, such that impurities are removed from the test chamber. This also produces a negative pressure in the test chamber, that is to say a pressure level which is lower than the ambient pressure
Implementation Method 2
A negative-pressure chamber assigned to the opening is formed on the side of the chamber wall facing away from the test chamber, and the negative-pressure chamber is assigned a second negative-pressure generator in order to be able to generate a negative pressure in the negative-pressure chamber independently of a vacuum in the test chamber
Data Source
AI summary
A test system (1) having a test chamber (2) for a test object, wherein the test chamber has at least one chamber wall (3) delimiting the test chamber. The test chamber is assigned a first vacuum generator (12) generating a vacuum in the test chamber. The chamber wall has an opening (4) to which a sensor module (5) is assigned. The sensor module has a carrier element (6), which is arranged on the chamber wall, to close the opening. A sensor (10) is arranged on a side of the carrier element facing toward the test chamber. A negative-pressure chamber (17) assigned to the opening is formed on the side of the chamber wall facing away from the test chamber. The negative-pressure chamber is assigned a negative-pressure generator (19) generating a negative pressure in the negative-pressure chamber independently of a vacuum in the test chamber.