Conformal Temperature Sensor Assembly for Vacuum Surface Averaging

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Solution Overview

Problem

Existing temperature sensor arrangements provide unreliable temperature readings due to their dependency on sensor positioning, which can lead to inaccurate and inconsistent temperature control.

Innovation Solution

A vacuum apparatus temperature sensor assembly featuring a sheet substrate that conforms to the shape of the apparatus, thermally coupled with a temperature sensor to provide a reliable thermal path for temperature measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If a temperature sensor is positioned close to the vacuum apparatus surface, then the temperature measurement responsiveness is improved, but the measurement precision deteriorates due to positioning dependency and localized temperature variations

Engineering Contradiction:
Improvetemperature measurement responsivenessVSAvoidtemperature measurement accuracy
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The patent combines multiple temperature sensing points into a single averaged temperature reading by thermally coupling the sensor assembly to multiple locations on the vacuum apparatus. This merging approach maintains responsiveness while eliminating positioning dependency and providing a representative average temperature measurement.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces a thermal coupling medium or assembly that acts as an intermediary between the vacuum apparatus surface and the temperature sensor. This intermediary distributes thermal energy from multiple locations to the sensor, improving both responsiveness and accuracy by capturing localized temperature variations.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If the temperature sensor assembly structure is simplified, then the device complexity is reduced, but the reliability of temperature measurement deteriorates due to positioning sensitivity

Engineering Contradiction:
Improvesensor assembly structureVSAvoidtemperature measurement consistency
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent merges multiple sensing functions into a single integrated assembly that provides reliable temperature measurements regardless of positioning. This combination approach maintains measurement consistency while keeping the overall assembly structure relatively simple and easy to install.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If the sheet substrate width is increased to ensure coverage of heater elements, then the measurement precision is improved, but the area of the substrate increases leading to greater material usage

Engineering Contradiction:
Improveheater element coverageVSAvoidsubstrate area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent applies local quality by concentrating the substrate area where it is most needed - over the heater elements and critical temperature zones. The substrate is configured to provide sufficient coverage for accurate measurement while minimizing excess material usage in non-critical areas.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures more accurate and reliable temperature readings by averaging temperature differences across the vacuum apparatus, reducing reliance on sensor placement and enhancing thermal conductivity and responsiveness.

Implementation Method 1

a temperature sensor thermally coupled with the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the vacuum apparatus to the temperature sensor

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12320710B2Vacuum apparatus temperature sensor assembly
Publication Date: 2025.06.03 EDWARDS VACUUM LLC
  • US12320710B2 patent drawing

AI summary

A vacuum apparatus temperature sensor assembly for measuring the temperature of a vacuum apparatus and a method are disclosed. The vacuum apparatus temperature sensor assembly comprises: a sheet substrate configured to conform to a shape of an item, equipment or apparatus whose temperature is to be determined; and a temperature sensor thermally coupled with the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the apparatus to the temperature sensor. In this way, the substrate provides a larger area than that of the temperature sensor to couple with the apparatus which enables the average temperature of the apparatus to be more reliably and accurately conveyed to the temperature sensor and make the temperature measurements less reliant on the exact placing of the temperature sensor with respect to the apparatus.