Vacuum Stage Support With Actuator Compensation for Container Deformation
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Solution Overview
Problem
Existing vacuum processing apparatuses face challenges in maintaining the precise position and inclination of a stage due to deformations caused by pressure differences and temperature changes, leading to deviations in substrate processing.
Innovation Solution
The apparatus incorporates a support member that penetrates the processing container's bottom to support the stage, with a base member and parallel actuators that adjust the stage's position and inclination by moving relative to the container's bottom, and an absorption mechanism to absorb deformation stress, ensuring accurate positioning and inclination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the stage is supported from below the processing container bottom, then the stage position can be adjusted, but the processing container deforms due to pressure difference causing stage position deviation
Solution Approach 1:
The patent introduces a base member as an intermediary component between the processing container bottom and the stage support system. The base member is movable relative to the processing container bottom and is engaged with the support member, allowing it to compensate for deformations caused by pressure differences. This intermediary structure absorbs the deformation stress and prevents it from directly affecting the stage position, thereby maintaining both adjustability and stability.
2Productivity
If the processing container maintains vacuum atmosphere, then substrate processing can be performed, but pressure difference causes processing container deformation
Solution Approach 1:
The patent converts the harmful effect of pressure difference-induced deformation into a beneficial compensation mechanism. The base member is designed to move in response to the processing container deformation, and this movement is utilized to adjust the support member position accordingly. By allowing the base member to follow the container deformation, the system compensates for the shape change and maintains accurate stage positioning despite the vacuum pressure difference.
3Adaptability or versatility
If actuators are provided between processing container bottom and base member, then base member position can be adjusted, but device complexity increases
Solution Approach 1:
The patent designs the base member to serve multiple functions: it acts as a support engagement component, a movable compensation element for pressure deformation, and a positioning interface for the actuators. The actuators not only adjust the base member position but also work in conjunction with the base member's inherent movability to provide comprehensive stage positioning and inclination adjustment. This multi-functionality reduces the need for additional separate components, thereby managing device complexity while maintaining high adaptability.
Data Source
AI summary
The present disclosure reduces deviation in the position and inclination of a stage due to the deformation of a processing container. A vacuum processing apparatus includes a processing container configured to be capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container such that a substrate is placed thereon, a support member passing through a hole in the bottom of the processing container to support the stage from the bottom side, a base member engaged with an end portion of the support member located outside the processing container to be movable integrally with the stage, and a plurality of actuators provided in parallel with each other between the bottom of the processing container and the base member and configured to adjust a position and an inclination of the stage by moving the base member relative to the bottom of the processing container.