Vacuum Stage Compensation for Container Deformation Control
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Solution Overview
Problem
Existing vacuum processing apparatuses face challenges in maintaining precise positioning and inclination of stages due to deformation of the processing container caused by pressure and temperature changes, leading to deviations that affect substrate processing uniformity.
Innovation Solution
A vacuum processing apparatus with a support member and actuators that adjust the stage's position and inclination by moving a base member relative to the processing container, using a parallel link mechanism and absorption mechanism to mitigate deformation effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the processing container is used to maintain vacuum atmosphere, then the vacuum environment is achieved, but the processing container deforms due to pressure and temperature changes causing stage position and inclination deviations
Solution Approach 1:
The support member is designed to be movable rather than fixed, allowing it to dynamically adjust the stage's position and inclination in response to processing container deformation. The actuator enables real-time adjustment during vacuum processing, transforming a static support structure into a dynamic compensation system that maintains precision despite environmental changes.
Solution Approach 2:
The system incorporates sensors to detect the actual position and inclination of the stage, and the controller uses this feedback information to calculate and execute corrective movements of the support member. This closed-loop control system continuously compensates for deformation-induced deviations, ensuring stage precision is maintained throughout the vacuum processing operation.
2Manufacturing precision
If the stage position and inclination are adjusted to compensate for deformation, then processing precision is improved, but the device complexity increases due to additional actuators and control mechanisms
Solution Approach 1:
The compensation function is divided into independent components: the actuator handles position adjustment, while separate mechanisms handle inclination adjustment. This segmentation allows each component to be optimized independently and simplifies the control logic by breaking down the complex adjustment task into manageable, modular functions.
Solution Approach 2:
The support member serves multiple functions: it provides mechanical support for the stage, enables position adjustment via the actuator, and facilitates inclination adjustment through its movable connection. This multi-functionality reduces the need for separate dedicated components for each adjustment function, thereby limiting the increase in overall device complexity.
3Measurement precision
If the support member is made movable to adjust stage position, then positioning accuracy is improved, but the structural stability of the processing container is compromised
Solution Approach 1:
The support member acts as an intermediary element between the fixed processing container and the movable stage. It absorbs the deformation effects from the processing container while providing a stable platform for the stage, isolating the stage from direct structural changes in the container and maintaining both positioning accuracy and container stability.
Data Source
AI summary
The present disclosure reduces deviation in the position and inclination of a stage due to the deformation of a processing container. A vacuum processing apparatus includes a processing container configured to be capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container such that a substrate is placed thereon, a support member passing through a hole in the bottom of the processing container to support the stage from the bottom side, a base member engaged with an end portion of the support member located outside the processing container to be movable integrally with the stage, and a plurality of actuators provided in parallel with each other between the bottom of the processing container and the base member and configured to adjust a position and an inclination of the stage by moving the base member relative to the bottom of the processing container.