Vacuum Processing Stage Sealing Unit for Load Lock Exchange
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Solution Overview
Problem
The existing vacuum processing apparatuses with load lock chambers face inefficiencies in the exchange operation between the load lock chamber and the processing chamber, requiring multiple transfer operations that prolong the time needed for object exchange.
Innovation Solution
A vacuum processing apparatus configuration where the stage with a sealing unit is used to transfer objects between the load lock chamber and the processing chamber, allowing for automatic separation and minimizing the need for door openings, thus reducing the exchange time by interlocking the stage position with the communication unit's opening and closing operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple door operations and transfer steps are used for object exchange, then vacuum integrity is maintained, but the exchange operation becomes complex and time-consuming
Solution Approach 1:
The patent merges the sealing function into the stage assembly itself through the movable partition wall. As the stage moves between chambers, the partition wall automatically seals the communication passage, eliminating the need for separate door operations. This reduces exchange operation complexity from multiple discrete steps to a single integrated motion while maintaining vacuum integrity
Solution Approach 2:
The stage assembly performs its own sealing function through the movable partition wall that is coupled to it. The partition wall automatically seals the communication passage as the stage moves, without requiring external door mechanisms or additional sealing operations. This self-service approach simplifies the exchange operation while preserving vacuum integrity
Data Source
Figure 1
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AI summary
A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3.