Vacuum Substrate Carrier for Dual-Side Processing

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Solution Overview

Problem

Existing substrate carrier systems fail to simultaneously tension substrates and allow unencumbered processing of both sides without operator intervention or system alteration, often leading to defects like wrinkles and limited processing options due to excessive frame thickness and mismatched thermal expansion coefficients.

Innovation Solution

A substrate carrier system featuring a frame with structurally manipulated outer edges and suspension arms that allow vertical translation, enabling tensioning and processing of both substrate sides without changing the carrier system, using a disposable frame with suction areas and registration means for robust handling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a split frame with external forces is used to tension the substrate, then the substrate can be held taut during processing, but additional appliances are required to maintain external forces and apply tension

Engineering Contradiction:
Improvesubstrate tensionVSAvoidcarrier system complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical tensioning systems with a vacuum-based system. A vacuum chamber creates negative pressure that pulls the substrate taut against the carrier surface, eliminating the need for mechanical springs, weights, or external force applications while achieving consistent substrate tension.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses vacuum (pneumatic principle) to create the tensioning force. By applying negative pressure through vacuum ports in the carrier, the substrate is pulled uniformly across the carrier surface, providing stable tension without mechanical complexity.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Strength

If a thick frame is used to maintain mechanical integrity, then the carrier can support the substrate, but it creates a hindrance to assembly techniques like screening and printing

Engineering Contradiction:
Improveframe mechanical integrityVSAvoidprocessing accessibility
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The patent employs a thin-frame carrier design that relies on vacuum pressure rather than structural thickness for support. The frame can be minimalistic and thin because the vacuum field provides the necessary mechanical support and substrate holding force, allowing unencumbered access for screening, printing, and other assembly techniques.

Inventive Principle:
Principle #30Flexible shells and thin films

3Strength

If the frame material has a higher CTE than the substrate, then the substrate becomes tensioned when heated, but exotic frame materials are required which are expensive

Engineering Contradiction:
Improvesubstrate tension through thermal expansionVSAvoidframe material cost
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The patent replaces thermal expansion-based tensioning with vacuum-based tensioning. The vacuum system creates tension forces independent of thermal expansion coefficients, allowing the use of common, inexpensive frame materials without requiring exotic high-CTE materials while still achieving consistent substrate tension throughout processing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Stability of the object's composition

If the frame supports the edges of the substrate, then the substrate is held in place, but the ability to process these same edges is limited

Engineering Contradiction:
Improvesubstrate positioningVSAvoidedge processing capability
Core Design Contradiction:
Stability of the object's compositionVSEase of operation

Solution Approach 1:

The patent introduces a vacuum field as an intermediary between the frame and substrate. Instead of direct mechanical contact at the edges, the vacuum pressure distributes holding force across the entire substrate surface, allowing the edges to remain accessible for processing while maintaining stable substrate positioning through the vacuum field.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS8234780B2Substrate carrier system
Publication Date: 2012.08.07 UNIVERSAL INSTR CORP
  • US8234780B2 patent drawing
  • US8234780B2 patent drawing
  • US8234780B2 patent drawing

AI summary

A substrate carrier system is provided for physical management of substrate(s) during a variety of assembly techniques performed on the both sides of the substrate(s) without dismounting or changing carrier systems.