Vacuum Substrate Storage Shell with Sealing and Monitoring
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Solution Overview
Problem
Current methods for storing and transporting semiconductor substrates, such as reticles and wafers, expose them to contamination and damage due to air exposure during transfer between vacuum environments, making long-term storage and transportation inefficient and unsuitable for large quantities.
Innovation Solution
A two-piece shell system with vacuum-sealing capabilities, featuring a recessed interior and a vacuum gasket for maintaining a vacuum environment, along with pressure sensors for monitoring and alerting on vacuum integrity, allows for the secure storage and transportation of substrates while minimizing exposure to airborne contaminants.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrates are stored in vacuum processing environments for short durations, then substrates are protected from contamination, but valuable in-vacuum space is consumed and it is not suitable for longer term storage
Solution Approach 1:
The invention divides the storage system into separate components: a vacuum storage chamber and individual sealed containers (cassettes or FOUPs). Each container independently maintains vacuum or controlled atmosphere, allowing substrates to be stored outside the main vacuum chamber while preserving protection from contamination.
Solution Approach 2:
The invention introduces sealed containers (cassettes, FOUPs) as intermediary devices between the vacuum processing environment and atmospheric storage. These containers maintain vacuum or controlled atmosphere internally, acting as a buffer that protects substrates from contamination while allowing external storage in atmospheric conditions.
2Productivity
If substrates are transferred using batch transfer techniques with multi-wafer carriers, then multiple substrates can be transferred, but substrates are exposed to air contamination during transfer and storage box opening
Solution Approach 1:
The invention uses sealed containers (cassettes, FOUPs) as intermediaries that maintain vacuum or controlled atmosphere during transfer. These containers allow batch transfer of multiple substrates while keeping them sealed and protected from airborne particles throughout the transfer process and during storage box opening.
Solution Approach 2:
The invention employs inert atmospheres (vacuum, nitrogen, or other inert gases) within sealed containers during transfer and storage. This creates a protected environment that prevents contamination from airborne particles while allowing efficient batch transfer operations.
3Reliability
If substrates are stored in sealed boxes under atmospheric or vacuum pressure, then substrates can be stored, but the box must be opened and substrate exposed to air environment during transfer
Solution Approach 1:
The invention uses sealed containers (cassettes, FOUPs) as intermediaries that maintain vacuum or controlled atmosphere during transfer. These containers allow substrates to remain sealed and protected from airborne particles throughout the transfer process and during storage box opening.
Solution Approach 2:
The invention performs preliminary sealing of substrates in vacuum or controlled atmosphere within containers before transfer. This preliminary action ensures substrates are already protected when transferred, eliminating the need to open boxes during transfer and preventing exposure to air contamination.
4Reliability
If vacuum environments are used in processing and handling substrates, then substrates are protected from contamination, but transfer between separate vacuum processing environments is unsuitable
Solution Approach 1:
The invention uses sealed containers (cassettes, FOUPs) as intermediaries that can be transferred between separate vacuum processing environments. These containers maintain vacuum or controlled atmosphere internally, allowing substrates to be moved between different vacuum systems without exposure to contamination.
Solution Approach 2:
The invention divides the transfer system into separate sealed containers that can independently maintain vacuum conditions. This segmentation allows each container to be transferred between different vacuum environments while maintaining its internal vacuum, enabling versatile transfer capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively maintains a vacuum environment for substrates during storage and transport, reducing contamination risks and enabling efficient transfer between vacuum processing systems, thus addressing the limitations of existing storage and transportation methods.
Implementation Method 1
a perimeter around the recessed interior including a vacuum gasket; and a second half adjacent to the first half, the second half including an interior face including a surface contacting the vacuum gasket to form a vacuum seal capable of retaining a vacuum within the recessed interior
Implementation Method 2
At least one of the first half and the second half may have a pressure sensor disposed thereon for monitoring a vacuum level within the recessed interior
Implementation Method 3
exposure to air brings with it the risk of contamination and damage to the substrate, so vacuum environments are commonly used in processing, handling, and using these substrates
Data Source
AI summary
A two piece shell is employed for intermediate and long term storage of substrates. The shell is formed of two halves that can be juxtaposed in vacuum and externally vented, with the internal vacuum retaining the halves in vacuum-sealed engagement. One of the halves also provides a vacuum-sealing perimeter for selectively sealing to a process chamber during loading and/or unloading of the shell with a substrate. A vacuum monitor or the like may be employed to monitor pressure during storage and provide alerts if the vacuum within the sealed shell is compromised.