Vacuum Susceptor Transfer for Fast Process Chamber Changeover
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Solution Overview
Problem
The replacement of susceptors in processing systems, such as semiconductor processing, results in significant downtime due to manual disassembly and requalification, disrupting the system's operation and efficiency.
Innovation Solution
Implementing automated methods and equipment, including robots and load lock chambers, to transfer susceptors and substrates within the processing system without exposing them to atmospheric conditions, allowing for seamless susceptor replacement and maintenance of non-atmospheric pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual susceptor replacement is performed, then susceptor can be replaced with new or different susceptor, but significant downtime occurs due to disassembly and requalification
Solution Approach 1:
The system is divided into separate functional modules: a susceptor storage enclosure, a process chamber, and an automated transfer mechanism. The susceptor transfer mechanism is segmented into robotic manipulation components that can independently handle susceptor removal, insertion, and positioning without requiring manual disassembly of the entire processing system.
Solution Approach 2:
The automated robot performs susceptor replacement operations autonomously without human intervention. The system self-manages the transfer process by detecting susceptor positions, executing precise robotic movements, and maintaining vacuum conditions automatically, eliminating the need for manual operation and associated downtime.
2Adaptability or versatility
If manual disassembly and requalification is performed for susceptor replacement, then susceptor can be changed, but system operation is disrupted and efficiency decreases
Solution Approach 1:
An automated robot acts as an intermediary between the susceptor storage enclosure and the process chamber. This robotic mediator handles all susceptor transfer operations, including grasping, transporting, and positioning susceptors onto substrates, thereby eliminating the need for manual disassembly and maintaining continuous system operation.
Solution Approach 2:
The system maintains a vacuum environment throughout the susceptor transfer process using a load lock chamber and vacuum-compatible robotic mechanisms. This allows susceptor replacement to occur without breaking vacuum, preventing system disruption and maintaining processing efficiency by eliminating pump-down and vent cycles.
3Measurement precision
If automated methods are used to transfer susceptor, then handling accuracy improves and errors are reduced, but device complexity increases
Solution Approach 1:
The automated robot is designed with universal capabilities to handle multiple susceptor types and sizes through programmable end effectors. The same robotic system performs both susceptor transfer and substrate manipulation tasks, consolidating functions that would otherwise require separate specialized mechanisms, thereby managing complexity while maintaining high accuracy.
Data Source
AI summary
A method of moving a susceptor in a processing system, suitable for use in semiconductor processing, is provided. The method includes: moving a first susceptor from an interior volume of a first enclosure to an interior volume of a process chamber during a first time period; and positioning, during a second time period, a first substrate on the first susceptor when the first susceptor is in the process chamber, wherein the interior volume of the first enclosure and interior volume of the process chamber are maintained at a non-atmospheric pressure from the beginning of the first time period until the end of the second time period.