Vacuum Transfer Chamber Layout for Compact Substrate Handling
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Solution Overview
Problem
The increasing number of processing modules in substrate processing systems leads to a larger installation area, making it difficult to dispose multiple systems in facilities like clean rooms, necessitating a reduction in the installation area without compromising processing efficiency.
Innovation Solution
A transfer module comprising a first transfer chamber connected to a vacuum transfer module at low pressure and a second transfer chamber capable of switching pressure between atmospheric and low pressure, allowing objects to be transferred directly between the second chamber and the vacuum module without passing through an intermediate accommodation portion, thereby reducing the system's footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple processing modules are added to increase processing capacity, then productivity is improved, but the installation area increases
Solution Approach 1:
The patent utilizes vertical stacking of transfer chambers (first transfer chamber at low pressure, second transfer chamber that can switch between atmospheric and low pressure) to create a three-dimensional layout. This allows multiple processing functions to be arranged vertically rather than horizontally, reducing the footprint area while maintaining processing capacity.
Solution Approach 2:
The patent implements a nested structure where the second transfer chamber is positioned within or adjacent to the first transfer chamber, and the accommodation portion is integrated into the first transfer chamber. This nested arrangement allows multiple functional zones to share space, reducing the overall installation area while maintaining all necessary processing functions.
2Area of stationary object
If a direct transfer path is created between the second transfer chamber and vacuum transfer module, then the installation area is reduced, but the risk of cross-contamination increases
Solution Approach 1:
The first transfer chamber serves as an intermediary zone between the second transfer chamber (atmospheric pressure) and the vacuum transfer module (low pressure). Objects are transferred through this intermediate low-pressure chamber, which acts as a buffer zone to prevent direct exposure between atmospheric and vacuum environments, thereby reducing cross-contamination risk while enabling compact arrangement.
Solution Approach 2:
The patent maintains a low pressure (vacuum) environment in the first transfer chamber and vacuum transfer module, creating an inert atmosphere that prevents contamination. By keeping the transfer path under vacuum conditions and using the opening/closing door to seal the environment, the system protects substrates from atmospheric contamination during transfer.
3Reliability
If the opening/closing door is used to partition and communicate between chambers, then pressure control is improved, but the device complexity increases
Solution Approach 1:
The opening/closing door serves multiple functions: it partitions the first and second transfer chambers to maintain pressure differences, it can be opened to allow transfer of objects between chambers, and it provides sealing to prevent contamination. This multi-functional design reduces the need for separate components for each function, thereby managing complexity while achieving reliable pressure control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the installation area of the substrate processing system while maintaining efficient processing and minimizing cross-contamination by avoiding the coexistence of substrates before and after processing in the same container.
Implementation Method 1
a first transfer chamber connected to a vacuum transfer module and configured to be maintained at a low pressure lower than atmospheric pressure
Implementation Method 2
a second transfer chamber capable of accommodating a container accommodating a plurality of objects to be transferred and being configured to be able to switch an internal pressure between the atmospheric pressure and the low pressure
Data Source
AI summary
The present disclosure provides a transfer module, comprising: a first transfer chamber; a second transfer chamber, the second transfer chamber capable of accommodating a container accommodating a plurality of objects; and an opening/closing door configured to partition the first transfer chamber and the second transfer chamber, wherein the first transfer chamber has an accommodation portion configured to accommodate the object to be carried into the second transfer chamber, and the container accommodating the plurality of objects is carried into the second transfer chamber, the plurality of objects are transferred from the container to the accommodation portion in the first transfer chamber, the object is transferred from the accommodation portion into the vacuum transfer module, and the object carried out from the vacuum transfer module is transferred into the container without passing through the accommodation portion.