Vacuum Chamber Transfer Equipment Heat Dissipation
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Solution Overview
Problem
Existing vacuum chamber transfer equipment faces challenges in precise control due to backlash and requires expensive cable feedthroughs for linear motors and encoders, especially in high-voltage and vacuum environments, where signal disturbances and heat dissipation issues occur.
Innovation Solution
The design places a linear motor's permanent magnet inside the vacuum chamber and its coil outside, with cables and encoders also positioned outside to avoid high-voltage and vacuum exposure, using thin layers and bellows for magnetic field penetration and heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If linear motor and linear encoder are installed inside the vacuum chamber, then precise control of sample transfer is achieved, but cables must be installed inside the vacuum chamber requiring expensive feedthroughs
Solution Approach 1:
The linear motor is segmented into two parts: the coil (stator) is installed outside the vacuum chamber while the permanent magnet (mover) is installed inside. This segmentation allows the control system to be separated from the vacuum environment, eliminating the need for cables and feedthroughs while maintaining precise control capability.
Solution Approach 2:
The coil portion of the linear motor is extracted from the vacuum chamber and installed outside. This extraction removes the need for cable connections inside the vacuum chamber, eliminating the requirement for expensive feedthroughs while preserving the motor's functionality through the permanent magnet remaining inside.
2Ease of operation
If cables are installed inside the vacuum chamber in high voltage environment, then power and signals can be supplied to linear motor and encoder, but signal disturbance or error may occur
Solution Approach 1:
The coil and cable connections are extracted from the high voltage vacuum environment and installed outside the chamber. This allows power and signal supply while completely avoiding the high voltage interference that would cause signal disturbance or error.
3Productivity
If linear motor is installed inside the vacuum chamber, then direct actuation is achieved, but heat dissipation problem occurs due to heat generated from coil
Solution Approach 1:
The coil, which generates heat during operation, is extracted from the vacuum chamber and installed outside. This allows the heat-generating component to be removed from the vacuum environment where heat dissipation is difficult, while the permanent magnet remains inside to provide the actuating force for direct motion.
Solution Approach 2:
The heat dissipation requirement is addressed by locating the heat-generating coil in a different environment (atmospheric pressure outside the chamber) where heat dissipation is efficient, while maintaining the actuation function inside the vacuum chamber through the permanent magnet.
4Device complexity
If screw transfer equipment is used, then simple structure is achieved, but precise control of sample is difficult due to backlash
Solution Approach 1:
The screw mechanism is replaced with a linear motor system that uses electromagnetic force for direct actuation. This substitution eliminates the mechanical backlash inherent in screw mechanisms while maintaining structural simplicity, achieving both precise control and ease of implementation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for reliable, cost-effective operation in high-voltage environments by eliminating signal disturbances and simplifying heat dissipation, reducing the need for expensive cable feedthroughs and enhancing precision in vacuum chamber transfers.
Implementation Method 1
a first-axis linear coil (24) fixed outside of the vacuum chamber... a first-axis linear permanent magnet (63) arranged in the first-axis direction and installed at a lower portion of the first-axis slider (60) to slidingly move together with the first-axis slider (60)
Implementation Method 2
The first thin layer (213) is placed between the first-axis linear coil (24) and the first-axis permanent magnet (63)... includes a material through which the magnetic field penetrates
Data Source
AI summary
Provided is equipment for transferring a vacuum chamber that solves a problem of heat dissipation of a driver by (i) placing a permanent magnet, which is a stator structure of a linear motor and causes linear motion, inside a vacuum chamber and (ii) by placing a coil of a driver structure outside the vacuum chamber. Under this structure, (i) no cable is installed in inside the chamber, and (ii) heat generated from the driver structure can be smoothly dissipated. The transfer equipment includes: a first-axis linear coil (24) that is fixed to an outside of the vacuum chamber at a bottom surface of the housing (11) of the vacuum chamber (10); a first-axis slider (60) that is installed inside the vacuum chamber (10) and moves in a first-axis direction relative to a bottom of an inner space of the vacuum chamber (10); and a first-axis linear permanent magnet (63). The first-axis linear permanent magnet (63) is arranged in the first-axis direction, is installed in a lower portion of the first-axis slider (60), and slidingly moves together with the first-axis slider (60).