Vacuum Transfer Positioning for Plasma Chamber Edge Ring Replacement
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Solution Overview
Problem
Existing processing systems face inefficiencies in replacing consumable members, such as edge rings, in plasma processing chambers, which affects the precision and efficiency of plasma processing operations.
Innovation Solution
A processing system comprising a chamber, a storage module, a position detection sensor, and a vacuum transfer module with a transfer robot, controlled by a controller to efficiently transfer and position consumable members, allowing for precise replacement and adjustment of consumable members like edge rings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual teaching is used for transfer robot positioning, then positioning can be performed, but the operational efficiency is reduced and downtime increases
Solution Approach 1:
The patent replaces manual teaching operations with an optical detection system. A sensor detects the position of the consumable member in the storage module, and this detection information is used to automatically calculate and adjust the transfer robot's movement parameters, eliminating the need for manual teaching and positioning operations.
Solution Approach 2:
The system enables self-positioning through automatic detection and calculation. The sensor automatically detects consumable member positions, and the control unit automatically calculates the necessary transfer parameters, allowing the system to self-adjust without external manual intervention for positioning.
2Manufacturing precision
If consumable members are replaced frequently, then processing precision is maintained, but system downtime increases
Solution Approach 1:
The patent implements preliminary positioning preparation by detecting the consumable member's position in the storage module before transfer. The control unit calculates the required transfer parameters in advance, so that when the consumable member needs replacement, the transfer robot can immediately execute the pre-calculated positioning without delays for on-site adjustment or teaching.
Solution Approach 2:
The system uses sensor feedback from the storage module to continuously monitor consumable member positions. This feedback information is fed back to the control unit, which automatically adjusts transfer parameters to ensure precise positioning during replacement operations, maintaining precision while minimizing downtime through automated real-time adjustments.
Data Source
AI summary
There is provided a processing system. The processing system comprises: a chamber in which a consumable member is installed; a storage module configured to store the consumable member; a position detection sensor configured to detect a position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module; and a controller. The controller is configured to perform processes of: (a) controlling the transfer robot to transfer the consumable member installed in the chamber to the storage module; (b) detecting the position of the consumable member transferred to the storage module by the position detection sensor; and (c) controlling the transfer robot to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).