Vacuum Substrate Transfer with Fixed Robots and a Movable Buffer

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Solution Overview

Problem

Existing transfer systems face challenges in increasing transfer efficiency and reducing costs due to the complexity and cost of movable robots, which can lead to decreased availability and increased processing times for substrates in substrate processing apparatuses.

Innovation Solution

A transfer system that incorporates fixed robots and a movable buffer within a transfer chamber, where the buffer moves horizontally along the chamber's side wall to exchange substrates with processing chambers, simplifying the moving mechanism and reducing costs by using a non-contact linear motor for the buffer's movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a movable robot is used to transfer substrates in a decompressed atmosphere, then transfer flexibility is improved, but device complexity and cost increase

Engineering Contradiction:

Improvetransfer flexibilityVSAvoidmoving mechanism complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The transfer system is divided into two independent parts: fixed robots that remain stationary and a movable buffer that travels along the side wall. This segmentation allows the system to maintain transfer flexibility through the movable buffer while keeping the robots simple and fixed, thereby reducing overall device complexity

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of making the robot movable to achieve transfer flexibility, the invention inverts the approach by making the buffer movable while keeping the robots fixed. This inversion solves the technical contradiction by achieving the desired flexibility through a different component

Inventive Principle:

Principle #13The other way round (Inversion)

2Adaptability or versatility

If a movable robot is used to transfer substrates, then transfer capability is improved, but operational cost increases

Engineering Contradiction:

Improvetransfer capabilityVSAvoidoperational cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

By separating the transfer function into fixed robots and a movable buffer, the system reduces operational costs while maintaining transfer capability. The fixed robots are simpler and cheaper to operate, while the movable buffer provides the necessary flexibility

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention replaces the complex mechanical system of a movable robot with a simpler combination of fixed robots and a movable buffer, thereby reducing operational costs while maintaining the required transfer capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If a movable robot is used for substrate transfer, then transfer function is improved, but availability decreases

Engineering Contradiction:

Improvetransfer functionVSAvoidavailability

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

Dividing the transfer system into fixed robots and a movable buffer improves availability by reducing the complexity and potential failure points of the moving components. The fixed robots remain reliable and simple, while the buffer handles the movement requirements

Inventive Principle:

Principle #1Segmentation

4Adaptability or versatility

If a movable robot is used to transfer substrates, then transfer capability is improved, but processing time increases

Engineering Contradiction:

Improvetransfer capabilityVSAvoidprocessing time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The segmented architecture with fixed robots and a movable buffer enables more efficient substrate transfer by allowing the buffer to move quickly between positions while the robots perform rapid pick-and-place operations, thereby reducing overall processing time

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances transfer efficiency, reduces the moving mechanism's complexity, and lowers operational costs by minimizing the weight of moving subjects, thereby improving the availability and processing capacity of substrates within the transfer chamber.

Implementation Method 1

a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber

Methodology Applied

Scientific EffectLinear motor: Linear Motor

Data Source

PatentUS11804391B2Transfer system, transfer method, and transfer apparatus

Publication Date: 2023.10.31 YASKAWA DENKI KK

AI summary

A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.