Vacuum Substrate Transfer Robot With Sealed Parallel Link Arms
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Solution Overview
Problem
Conventional substrate transfer robots experience vibrations and disturbances during substrate transfer due to off-centered end effectors, and are hindered by thermal expansion of transfer link arms, leading to inaccuracies and reduced throughput, with the generation of particles within the vacuum chamber being a further concern.
Innovation Solution
A substrate transfer robot design featuring a double parallel link structure with sealed compartments and integrated speed reducers, which minimizes vibrations and thermal expansion effects by maintaining a sealed environment and improving rigidity, thereby preventing particle generation and enhancing transfer accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If off-centered positions of upper end effector and lower end effector are coupled to upper arm and lower arm to avoid collisions, then collision avoidance is achieved, but vibrations and disturbances are generated on end effectors during linear motions
Solution Approach 1:
The patent applies asymmetry by intentionally designing the coupling positions of end effectors to arms in an off-centered configuration. This asymmetric coupling allows the end effectors to follow linear paths while avoiding collisions with the arms during substrate transfer operations in the vacuum chamber.
2Power
If transfer link arm is subjected to thermal expansion from heat generated by internal speed reducer, then speed reduction function is achieved, but parallelogram structure deforms and end effector position changes
Solution Approach 1:
The patent addresses thermal expansion by incorporating compensation mechanisms that detect and correct position deviations caused by temperature changes. The system dynamically adjusts parameters such as link arm lengths or coupling positions to maintain end effector accuracy despite thermal effects from the speed reducer operation.
3Manufacturing precision
If conventional substrate transfer robot is preliminarily operated to minimize thermal expansion, then position accuracy is improved, but throughput is reduced due to additional time
Solution Approach 1:
The patent implements preliminary thermal conditioning of the transfer link arms before substrate transfer operations. By pre-heating or pre-cooling the link arms to operational temperature, the system minimizes thermal expansion during actual substrate transfer, eliminating the need for preliminary operations that would reduce throughput.
4Reliability
If sealed structure is implemented in link arms to maintain vacuum condition, then vacuum efficiency is improved, but device complexity increases
Solution Approach 1:
The patent applies nesting by placing sealing mechanisms within the hollow interior of the link arms. The sealing structures are nested inside the existing link arm geometry, maintaining the vacuum barrier without requiring external sealing components that would increase overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The robot achieves reduced vibrations and positional changes of end effectors, eliminates the need for preliminary operations, and increases throughput by maintaining a sealed vacuum environment and preventing structural deformation caused by thermal expansion.
Implementation Method 1
a speed reducer, which reduces a rotational speed of the driving motor by half
Implementation Method 2
minimizes vibrations and thermal expansion effects by maintaining a sealed environment
Implementation Method 3
a substrate transfer robot, installed in the transfer chamber that is in a vacuum state
Data Source
AI summary
A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein link connecting members with blades are engaged at front and rear areas of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms, multiple subordinate link arms and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.