Vacuum Tray Transfer for Multi-Section Substrate Processing
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in setting different material movement speeds for each process due to the complexity of transferring materials using belts or rollers, making it difficult to optimize processing efficiency.
Innovation Solution
A substrate processing apparatus with a tray having an adsorption maintenance space and a driving unit that uses pressure differences to control the movement speed of materials through multiple process sections, allowing for independent speed adjustment in each section.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If belts or rollers are used to transfer materials, then material transfer is achieved, but it is difficult to set different material movement speeds for each process
Solution Approach 1:
The transfer apparatus is divided into multiple independent drive units, each corresponding to a specific process section. Each drive unit can independently control the speed of the tray in its designated section, allowing different movement speeds for different processes without requiring a complex variable speed mechanism throughout the entire system.
Solution Approach 2:
Different sections of the tray transfer path are assigned different drive units with different speed characteristics. This allows each process section to have locally optimized speed settings tailored to its specific processing requirements, rather than using a uniform speed control system.
2Reliability
If a material is adsorbed onto a tray, then transfer stability is improved, but complex equipment is required to maintain the adsorption state
Solution Approach 1:
The adsorption maintenance function is extracted as a separate, dedicated unit that selectively engages with the tray only when needed. The adsorption maintenance unit includes a maintenance section with suction holes that can be activated to maintain adsorption during specific phases of the tray cycle, rather than requiring continuous complex control mechanisms.
Solution Approach 2:
The tray itself incorporates the adsorption functionality through integrated suction holes and adsorption sections. The tray design includes built-in features that enable it to maintain its own adsorption state during transfer, reducing the need for external complex maintenance equipment.
3Device complexity
If simple placement is used to transfer material, then equipment complexity is reduced, but transfer stability deteriorates
Solution Approach 1:
The invention combines the simplicity of tray-based transfer with the stability of adsorption by integrating adsorption holes directly into the tray structure. This merging allows the tray to function both as a simple transfer carrier and as an active adsorption device, achieving stability without requiring complex external fixing mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control of material movement speed in each process section, optimizing processing efficiency and reducing equipment size by minimizing the need for speed compensation mechanisms.
Implementation Method 1
configured to discharge a fluid from the adsorption maintenance space to form a pressure difference between the adsorption maintenance space and the outside
Implementation Method 2
configured to inject a fluid into the adsorption maintenance space
Data Source
AI summary
The present invention relates to a substrate processing apparatus in which a material adsorbed onto a tray undergoes a process. One embodiment of the present invention provides a substrate processing apparatus including a tray having an adsorption maintenance space formed therein, a driving unit configured to allow the tray to successively pass through a plurality of process sections, a low pressure forming unit positioned at one side of the driving unit at a position before the tray enters the plurality of process sections and configured to discharge a fluid from the adsorption maintenance space to form a pressure difference between the adsorption maintenance space and the outside, and a pressure difference removing unit disposed at one side of the driving unit at a position at which all of the plurality of process sections end and configured to inject a fluid into the adsorption maintenance space, wherein the tray adsorbs a material using the pressure difference.