In-Vacuum Twin-Arm Robot Layout for Compact Wafer Handling
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Solution Overview
Problem
Existing twin-arm robots for wafer transportation in vacuum spaces face challenges in utilizing internal space efficiently due to the placement of support shafts and end-effectors, which makes it difficult to accommodate sensors and electrical harnesses.
Innovation Solution
The design of an in-vacuum twin-arm robot with a base arm that can move vertically and rotate, featuring first and second arms that rotate independently, and hands that can change angles independently, allowing for efficient use of internal space and miniaturization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a second support shaft is provided within the first hollow support shaft, then the structural stability is improved, but the internal space utilization deteriorates and device complexity increases
Solution Approach 1:
The patent applies nesting by placing the second support shaft inside the first hollow support shaft, creating a compact multi-layered structure. This nested configuration maintains structural stability through multiple support elements while efficiently utilizing the internal space by arranging components in a concentric manner rather than requiring separate external mounting locations.
2Measurement precision
If end-effectors with sensors are mounted on the forearms, then measurement precision is improved, but the ease of operation deteriorates due to difficulty in placing harnesses
Solution Approach 1:
The patent uses the hollow support shaft as an intermediary pathway to route electrical harnesses from the base to the end-effectors mounted on the forearms. This intermediary structure provides a protected and organized channel for signal transmission, making harness installation and management easier while maintaining the sensor detection capabilities on the end-effectors.
3Length of moving object
If the base arm length is increased, then the access distance is improved, but the device complexity and internal space requirements increase
Solution Approach 1:
The patent extends the access distance by utilizing the vertical dimension through the movable base arm that can rise and fall, rather than solely relying on horizontal arm length extension. This dimensional approach allows the robot to reach further locations by combining vertical base arm movement with horizontal forearm rotation, achieving extended access without proportionally increasing overall structural complexity.
Data Source
AI summary
An in-vacuum twin-arm robot transports substrates in a vacuum space. The in-vacuum twin-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm can move vertically and can rotate. The first arm can rotate with respect to the base arm. The second arm can rotate with respect to the base arm. The first hand rotates with respect to the first arm and holds and transports the substrate. The second hand rotates with respect to the second arm and holds and transports the substrate. The first arm and the second arm are rotatably mounted on a leading end of the base arm via a joint shaft formed hollow. An angle of the first hand with respect to the first arm and an angle of the second hand with respect to the second arm can be changed independently of each other.