Vacuum Processing Unit Swing Mechanism for Easier Maintenance
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Solution Overview
Problem
Existing vacuum processing systems with communication pipes between the vacuum chamber and processing unit face poor maintenance performance due to the need for complex and cumbersome procedures for replacing targets and deposition preventing plates, which hinder efficient access and increase the risk of worker error.
Innovation Solution
A vacuum processing apparatus with a swing arm mechanism that allows for selective engagement and disengagement of the processing unit and communication pipe, enabling manual or automatic swinging to facilitate maintenance by allowing direct access to the processing unit away from the vacuum chamber, thereby improving maintenance efficiency and reducing interference from adjacent facilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the cathode unit and communication pipe are removed using hoist cranes to perform maintenance, then the maintenance can be performed, but the maintenance performance is remarkably poor due to complex procedures and poor workability
Solution Approach 1:
The system is divided into separable components: the communication pipe can be detached from both the vacuum chamber and the cathode unit. This segmentation allows maintenance personnel to access and service the cathode unit independently without requiring removal of the entire assembly using hoist cranes, significantly improving maintenance performance and workability.
Solution Approach 2:
The communication pipe is designed with detachable connections that allow it to be dynamically reconfigured during maintenance. The pipe can be selectively connected or disconnected from the vacuum chamber and cathode unit, enabling flexible access patterns that improve ease of repair while maintaining operational integrity during normal processing.
2Ease of repair
If the deposition preventing plate is replaced without replacing the target, then the plate can be maintained, but the cathode unit must be opened using complex opening and closing mechanisms resulting in poor workability
Solution Approach 1:
The communication pipe is segmented into detachable sections with standardized connections. This allows the deposition preventing plate to be accessed and replaced by simply detaching the communication pipe from the cathode unit, eliminating the need for complex opening and closing mechanisms and significantly simplifying the maintenance procedure.
3Manufacturing precision
If the communication pipe is present between the vacuum chamber and processing unit, then the LTS method can be implemented, but maintenance becomes complex and access is hindered
Solution Approach 1:
The communication pipe is designed as a detachable intermediate component that segments the system into independently serviceable portions. This segmentation maintains the precise positioning required for LTS film formation during operation, while allowing the pipe to be disconnected during maintenance to provide direct access to the cathode unit and vacuum chamber, thus resolving the contradiction between manufacturing precision and maintenance accessibility.
Solution Approach 2:
The communication pipe serves as an intermediary component with standardized detachable connections. It mediates between the vacuum chamber and cathode unit during normal operation to enable precise LTS processing, while its detachable nature allows it to be removed or disconnected during maintenance, providing direct access without permanent obstruction.
Data Source
AI summary
The vacuum processing apparatus for performing predetermined vacuum processing on a processing surface of a to-be-processed substrate is made up of: a vacuum chamber having disposed therein a to-be-processed substrate and having formed, on an upper wall of the vacuum chamber, a mounting opening facing the processing surface where a direction in which the processing surface looks is defined as an upper side; a processing unit for performing therein vacuum processing; and a communication pipe having a predetermined length and being interposed between the vacuum chamber and the processing unit such that predetermined processing is performed, through the communication pipe, on the to-be-processed substrate inside the vacuum chamber. The processing unit has an engaging means to which is coupled a swing arm for swinging about a rotary shaft extending perpendicularly to a vertical direction for selectively engaging the vacuum chamber and the communication pipe or the processing unit and the communication pipe.