Vacuum Valve Blade Cam Roller Guide Mechanism
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Solution Overview
Problem
Existing vacuum valves in semiconductor manufacturing suffer from mechanical wear-induced particle generation and space constraints due to complex structures and reliance on pneumatic pressure for operation, leading to air leaks and operational instability.
Innovation Solution
A vacuum valve design featuring a simple blade structure with cam rollers and guide grooves for fore-and-aft movement, integrated vertical and horizontal moving parts acting as cylinders, and a main body bracket with obliquely formed guide holes to prevent arbitrary operation, minimizing wear and optimizing compactness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a complex structure with mounting rolls, side rolling rolls, and O-rings is used to maintain vacuum sealing, then sealing effectiveness is improved, but mechanical wear occurs causing air leaks and particle generation
Solution Approach 1:
The patent removes the complex mounting rolls, side rolling rolls, and O-rings from the vacuum valve structure, retaining only the essential blade component for sealing. This extraction eliminates the sources of mechanical wear and particle generation while maintaining the core vacuum sealing function through the simplified blade design.
Solution Approach 2:
The patent replaces the pneumatic pressure system with a spring-based mechanical system for blade operation. The spring provides the necessary force to move the blade open or closed without requiring external pneumatic pressure, thereby eliminating the need for complex pneumatic components and reducing mechanical wear points.
2Ease of operation
If pneumatic pressure is used to operate the blade, then operational control is improved, but device complexity increases
Solution Approach 1:
The patent substitutes the pneumatic pressure system with a spring-based mechanical system. The spring is positioned to automatically push the blade to the open position, and can be compressed to close the blade, providing simple mechanical operation without complex pneumatic components, valves, or pressure control systems.
3Ease of manufacture
If a simple blade structure is used, then manufacturing ease is improved, but space for movement may be constrained
Solution Approach 1:
The patent positions the spring in the vertical dimension beneath the blade, allowing it to exert horizontal force on the blade's rear surface. This dimensional arrangement provides sufficient space for the spring mechanism without interfering with the blade's horizontal movement between open and closed positions, effectively resolving the space constraint issue.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design minimizes particle generation from mechanical wear, allows for simple operation, and reduces space requirements by using cam rollers and guide grooves, ensuring reliable sealing and compactness.
Implementation Method 1
a first piston, which moves vertically by pneumatic pressure
Implementation Method 2
a second piston provided to an inside of the horizontal moving part and vertically moved by pneumatic pressure
Data Source
AI summary
The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.