Two-part Vacuum Valve Disk for Sealing Reliability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Vacuum valves used in semiconductor manufacturing and other applications face challenges in maintaining gas-tightness and sealing reliability, especially under high differential pressures and pressure fluctuations, leading to reduced sealing effectiveness and potential damage to sealing components.
Innovation Solution
A two-part valve disk design with a first, outer disk section and a second, inner disk section, where the first disk section is axially sealed to the valve seat and the second disk section is radially sealed to the first section, allowing the inner disk section to be decoupled from the outer section and supported directly or indirectly on the valve housing, ensuring reliable sealing even under high pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single valve disk is used to close the opening, then the device complexity is low, but the sealing reliability deteriorates under high differential pressures and pressure fluctuations
Solution Approach 1:
The valve disk is divided into two separate disk sections: a first disk section that forms a gas-tight seal with the valve seat, and a second disk section that is movable in the axial direction. This segmentation allows the first disk section to maintain reliable sealing contact with the valve seat while the second disk section can move independently to accommodate pressure fluctuations, thereby improving sealing reliability without requiring excessive complexity in a single component.
2Reliability
If the valve disk is pressed firmly against the valve seat to ensure gas-tightness, then the sealing reliability improves, but the wear on sealing components increases
Solution Approach 1:
The second disk section is designed to be movable in the axial direction, allowing it to dynamically adjust its position in response to pressure fluctuations. This dynamic capability enables the sealing system to maintain gas-tightness through controlled contact between the first disk section and valve seat, while the movement of the second disk section absorbs excessive forces and reduces wear on the sealing components, thereby extending their operational life.
3Ease of manufacture
If the valve disk structure is simplified to reduce component count, then the ease of manufacture improves, but the ability to withstand high differential pressures deteriorates
Solution Approach 1:
The valve disk is segmented into two functional sections that work together to address pressure resistance requirements. The first disk section is designed to form a gas-tight seal with the valve seat, while the second disk section provides structural support and movable compensation for pressure differential forces. This segmentation allows the valve to withstand high differential pressures effectively while maintaining a relatively simple construction with only two main disk sections, balancing manufacturability with pressure resistance.
4Reliability
If a two-part valve disk design is implemented to improve sealing under pressure, then the sealing reliability improves, but the device complexity increases
Solution Approach 1:
The valve disk is divided into two disk sections with distinct functions: the first disk section forms a gas-tight seal with the valve seat, and the second disk section moves axially to compensate for pressure fluctuations. This segmentation improves sealing effectiveness by allowing each section to perform its specific function optimally.
Solution Approach 2:
The two disk sections are combined into a single integrated valve disk assembly that operates as one component. The first and second disk sections are positioned coaxially and work together to achieve both sealing and pressure compensation functions, thereby improving sealing effectiveness while limiting the increase in device complexity through their integrated configuration.
Data Source
AI summary
A vacuum valve including a valve housing with seat surrounding a first opening with a sealing surface is disclosed. A valve disk having a first disk section and a second disk section tightly mounted inside an outer boundary of the first disk that is movable parallel to an opening axis. A drive is connected to the first disk section. The first disk section includes a first bearing surface configured to contact the sealing surface in the closed position. The outer boundary has a radially inwardly oriented inner surface. The second disk section has a radially outwardly oriented outer surface configured to contact the inner surface sealing a second contact area. At least for determined radial angles about a center of the valve disk, a first radial distance from the center to the first bearing surface is shorter than a second radial distance from the center to the second contact area.