Vacuum Chamber Valve Gate Motion for Compact Thermal Sealing
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Solution Overview
Problem
Existing rectangular vacuum sealing valves face challenges such as space requirements for swinging gates, thermal issues due to unheated zones, and complex and unreliable sliding mechanisms, which affect the efficiency and reliability of vacuum processes in industries like architectural glass and semiconductors.
Innovation Solution
A compact elongated rectangular valve design that rotates the gate up and back out of plane with the substrate travel direction, using rotary actuators and a diagonal swing mechanism to minimize space and maintain the gate and O-ring protection, similar to sliding valves, while employing rotary vacuum seals for reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If an outward swing type rectangular valve gate is used, then the valve can be simple in structure and use rotary seals, but the gate takes up significant space in the substrate passage direction and causes thermal issues
Solution Approach 1:
The gate movement is changed from a simple single-plane swing to a two-dimensional motion path combining lateral translation and diagonal swinging. This dimensional change allows the gate to clear the substrate passage more efficiently while maintaining structural simplicity and rotary seal compatibility.
Solution Approach 2:
The valve mechanism uses dynamic motion control where the gate transitions through different positions (lateral movement to diagonal swing) during operation. This dynamic approach optimizes space utilization while maintaining the benefits of rotary actuators and seals.
2Device complexity
If an outward swing type rectangular valve gate is used, then the valve structure is simple, but the gate face cannot be heated and substrates cool off as they pass by
Solution Approach 1:
By changing the gate motion from simple swinging to lateral-plus-diagonal movement, the gate face is repositioned relative to the substrate path. This allows heating elements to maintain contact with the substrate even when the gate is open, preventing thermal fluctuations.
3Reliability
If a sliding type rectangular valve is used, then the gate and O-ring are protected from substrate and heaters, but the sliding mechanism becomes complicated and unreliable
Solution Approach 1:
The mechanism uses dynamic rotary motion with lateral and diagonal components instead of linear sliding. This maintains the protective positioning of the gate and O-ring while utilizing more reliable rotary seals and actuators.
Solution Approach 2:
The gate motion transitions from one-dimensional sliding to two-dimensional lateral-and-diagonal movement, achieving protection of sealing elements while avoiding the complexity and unreliability of sliding mechanisms.
4Length of moving object
If a sliding type rectangular valve is used, then space in travel direction is minimized, but multiple linear actuators and guide ways are needed causing synchronization issues
Solution Approach 1:
The valve uses dynamic rotary actuation with lateral and diagonal motion components instead of multiple linear actuators. This maintains compact dimensions while eliminating synchronization complexity through single rotary drive mechanisms.
Data Source
AI summary
A chamber valve (100) for use in processes requiring vacuum pressures has a compact design which minimizes the space needed for the valve in the travel direction. The chamber valve gate (116) is moveable between a first position in which the gate is offset from the portal (110), and a second position in which the gate is aligned with the portal. The gate will move into alignment with the portal while remaining within a plane parallel or nearly parallel to the portal.