Vacuum Valve Cartridge Heater Direct Conduction
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Solution Overview
Problem
Existing vacuum valves in semiconductor manufacturing apparatuses face inefficiencies in heat transfer due to indirect heating methods, and the complexity of heater attachment and replacement, which complicates the prevention of substance deposition from reaction gases.
Innovation Solution
A vacuum valve design featuring a column-shaped cartridge heater accommodated in a circular heater bore of the shaft, with a heat receiving groove and pressurizing portion at the joint of the valve element and shaft, allowing direct heat conduction and easy heater attachment and replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If indirect heating method with hot plate is used, then heater can be attached to valve element, but heat transfer efficiency is insufficient
Solution Approach 1:
The heating function is extracted from the indirect hot plate method and integrated directly into the valve element through embedded heating elements. This allows the heat source to be positioned within the valve element itself, eliminating the intermediate hot plate and achieving direct heat transfer to the valve element, thereby improving heat transfer efficiency.
Solution Approach 2:
The heating elements are nested within the valve element structure. The heating elements are embedded in the valve element, with the outer circumferential surface of the heating elements being in close contact with the inner circumferential surface of a groove formed in the valve element. This nested configuration ensures efficient heat transfer from the heating elements to the valve element while maintaining structural integrity.
2Temperature
If loop-shaped groove is formed in valve element, then heater can be placed in groove, but attachment mechanism becomes complicated and heater cannot be replaced
Solution Approach 1:
The heating system is segmented into replaceable heating elements that can be independently removed and replaced. The heating elements are positioned in grooves formed in the valve element and are retainable by the valve element structure, allowing for easy replacement without replacing the entire valve element or requiring complex attachment mechanisms.
Solution Approach 2:
The attachment mechanism is designed to be dynamic and reversible. The heating elements can be inserted into and removed from the grooves in the valve element, providing ease of replacement and maintenance while maintaining secure positioning during operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves higher heat transfer efficiency and simplifies heater replacement by direct heat conduction to the valve element, effectively preventing substance deposition and improving operational efficiency.
Implementation Method 1
a heating portion provided at an end portion of the cartridge heater is located at a joint portion of the shaft and the valve element... the heating portion is pressed by the pressurizing portion to enter into plane-to-plane contact with an inner circumferential surface of the arcuate groove portion of the heat receiving groove
Data Source
AI summary
A cartridge heater is accommodated in a heater bore in a shaft connected to a valve element, and a heating portion provided at an end portion of the cartridge heater is located at a joint portion of the shaft and the valve element. At the joint portion, a heat receiving groove and a pressurizing portion communicating with the heater bore are provided at a position between a surface of the valve element and that of the shaft located so as to oppose and to contact each other. The heat receiving groove includes an arcuate groove portion of the same radius as that of the heating portion of the cartridge heater, and the heating portion is pressed by the pressurizing portion to enter into plane-to-plane contact with an inner circumferential surface of the arcuate groove portion of the heat receiving groove, upon fastening the valve element and the shaft to each other with a bolt, with the heating portion located between the heat receiving groove and the pressurizing portion.