Vacuum Valve Bonnet Structure for Inertia Load Isolation
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Solution Overview
Problem
In vacuum processing devices, vacuum valves connected to turbo-molecular pumps face issues with inertia forces generated by rotor rotation, leading to potential damage and failure due to shear forces applied to bolts fixing the bonnet to the housing.
Innovation Solution
A valve device configuration featuring a load receiving portion, comprising a recessed portion and a protrusion, is introduced to absorb inertia forces, preventing relative position changes between the housing and bonnet, thus mitigating the risk of bolt damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the bonnet is detachably attached to the housing using bolts, then the valve device can be disassembled for maintenance, but the bolts are subjected to shear forces from inertia forces generated during rotor rotation, leading to potential bolt failure
Solution Approach 1:
The load receiving portion acts as an intermediary element between the bonnet and housing, specifically designed to intercept and bear the inertia forces generated during rotor rotation. This mediator structure prevents these forces from being transmitted to the bolts, thereby protecting the bolt connection while maintaining the detachable design for maintenance purposes
2Stability of the object's composition
If the bonnet is rigidly fixed to the housing, then the relative position remains stable under inertia forces, but the valve device cannot be disassembled for maintenance and inspection
Solution Approach 1:
The connection between bonnet and housing is segmented into two functional parts: the detachable bolt connection that enables maintenance access, and the load receiving portion that provides continuous mechanical support against inertia forces. This segmentation allows the system to achieve both stability during operation and ease of disassembly for maintenance
3Volume of moving object
If the hollow portion of the bonnet extends further from the flow path, then more space is available for valve body retraction, but the inertia forces generated at the bonnet increase, creating greater load on the connection
Solution Approach 1:
The load receiving portion serves as a mediator that decouples the relationship between bonnet volume and connection load. By providing this intermediate load-bearing structure, the system can accommodate larger bonnet volumes for valve body retraction without proportionally increasing the stress on the bolt connection, as the load receiving portion absorbs the generated inertia forces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively absorbs inertia forces, preventing shear force application to bolts and enhancing the durability and maintainability of vacuum valves by ensuring the bonnet and housing remain aligned, thereby reducing the likelihood of failure.
Implementation Method 1
a load receiving portion configured to receive inertia force generated at the bonnet by a rotation torque received by the housing due to external force
Data Source
AI summary
A valve device comprises: a housing provided with a flow path; a valve body configured to move in a direction intersecting the flow path, thereby controlling an opening area of the flow path; a bonnet provided with a hollow portion and detachably attached to the housing, the hollow portion extending from the flow path in a radial direction and the valve body being retracted into the hollow portion; and a load receiving portion configured to receive inertia force generated at the bonnet by a rotation torque received by the housing due to external force.


