Vacuum Valve Regulation with Valve-State Leak Detection
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Solution Overview
Problem
Vacuum regulating valves in semiconductor production face challenges in maintaining gas tightness and reliability due to external influences like leaks, which are not effectively detected by current pressure-based regulation methods.
Innovation Solution
A vacuum valve system with a regulating unit that records and compares valve states over time to detect deviations from target regulation, allowing for the identification of abrupt or long-term changes, and includes a learning functionality to adapt the regulation process based on recorded data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pressure-based regulation methods are used to control vacuum valves, then the regulation process is simple and responsive, but external influences like leaks cannot be effectively detected
Solution Approach 1:
The regulation system is segmented into multiple independent monitoring points that track different parameters (pressure, valve position, temperature) separately. This allows the system to detect leaks and anomalies by comparing segmented data without requiring complete system redesign, thus improving reliability while controlling complexity
Solution Approach 2:
An intermediary data processing layer is introduced between the pressure sensors and the regulation decision-making process. This intermediary layer analyzes valve position data, pressure changes, and temporal patterns to detect leaks, enabling reliable anomaly detection without directly increasing the complexity of the core regulation mechanism
2Reliability
If valve closure force is increased to ensure gas tightness, then sealing reliability improves, but the risk of damaging the sealing ring increases
Solution Approach 1:
The valve closure force is made dynamic rather than static. The system continuously adjusts the closure force based on real-time feedback from pressure sensors and valve position data. This allows the valve to apply sufficient force for gas tightness during operation while reducing force during closing and opening phases, preventing sealing ring damage
Solution Approach 2:
A feedback mechanism is implemented where pressure sensors and position sensors provide continuous information about valve state and sealing effectiveness. This feedback loop allows the control system to adjust closure force dynamically, ensuring gas tightness is maintained while avoiding excessive force that could damage the sealing ring
3Reliability
If the valve disk is pressed evenly against the valve seat to ensure gas tightness, then sealing effectiveness improves, but the two-step closing process increases operational complexity
Solution Approach 1:
The two-step closing process is merged into a single automated motion sequence controlled by an actuator. The actuator performs both the initial positioning (first step) and the final sealing contact (second step) in one continuous operation, maintaining sealing effectiveness while simplifying the operator's task to a single valve actuation command
Data Source
AI summary
A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.