Vacuum Valve Travel Limiting Rod Lockout
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Solution Overview
Problem
In semiconductor processing, vacuum valves pose a safety risk during maintenance as they can be operable and potentially crush fingers or limbs when servicing or cleaning the reaction chamber, necessitating a solution to safely lock out and tag out the valve.
Innovation Solution
A travel limiting device is mounted to the vacuum valve, featuring a body with mounting flanges and a rotatable travel limiting rod that restricts valve movement during maintenance, allowing safe operation by preventing accidental activation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the vacuum valve is left operable during maintenance, then the valve can be used immediately after servicing, but it poses a safety risk of crushing or severing fingers or limbs
Solution Approach 1:
The travel limiting device is installed on the vacuum valve before maintenance begins, preventing the valve from moving into dangerous positions in advance. The device includes a limit block that physically restricts the valve stem's travel distance, ensuring that even if the valve is accidentally actuated, it cannot move far enough to cause injury to workers performing maintenance on the reaction chamber.
Solution Approach 2:
The travel limiting device acts as an intermediary mechanical element between the valve actuator and the valve stem. It includes a body that attaches to the valve and a limit block that interfaces with the valve stem, mediating the movement to prevent excessive travel while still allowing controlled operation when needed.
2Object-affected harmful factors
If the vacuum valve is locked out with a travel limiting device, then worker safety is ensured, but the valve cannot be operated during maintenance
Solution Approach 1:
The travel limiting device provides dynamic control of valve operation. During maintenance, the limit block restricts valve stem travel to safe positions. When maintenance is complete, the device can be quickly removed or adjusted, allowing full valve operation to resume. This dynamic approach allows the system to switch between safe restricted operation and full operational capability as needed.
Solution Approach 2:
The device is installed beforehand to prevent dangerous movement during maintenance, then can be rapidly removed or adjusted after maintenance completes, allowing the valve to be immediately operated without requiring additional modification or repair work.
3Reliability
If a travel limiting device is installed on the vacuum valve, then accidental activation is prevented, but the device complexity increases
Solution Approach 1:
The travel limiting device is segmented into separate components: a body that attaches to the valve, a limit block that restricts movement, and a mounting mechanism with flanges and fasteners. This segmentation allows the device to be installed in modular fashion and removed easily when maintenance is complete, adding safety functionality without permanently complicating the valve structure.
Solution Approach 2:
The travel limiting device appears to be designed as a temporary, removable safety device rather than a permanent modification to the valve. It can be quickly installed before maintenance and removed afterward, serving its safety purpose for the duration of the maintenance activity without requiring permanent integration into the valve system.
Data Source
AI summary
A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.