Vacuum Valve Module for Independent Chamber Pump-Down Control
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Solution Overview
Problem
In semiconductor processing, pump-down events in one chamber can cause undesirable fluctuations in pressure conditions of other connected chambers due to shared manifolds, affecting the integrity of the vacuum system.
Innovation Solution
A valve module with pressure sensors and controllers that manage fluid flow through multiple chambers, directing gases to separate manifolds based on pressure thresholds, ensuring independent pump-down events for each chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate valve modules are used for each pumping system, then each system can be independently controlled and maintained, but the overall device complexity and space requirements increase
Solution Approach 1:
The patent combines multiple valve modules (first valve module for rough pumping, second valve module for high vacuum pumping) into a single integrated housing. This merging approach allows independent control of different pumping stages while reducing overall device complexity and saving space, directly resolving the contradiction between adaptability and device complexity.
2Device complexity
If multiple valve modules are integrated into a single housing, then space is saved and device complexity is reduced, but access to individual valves for maintenance becomes difficult
Solution Approach 1:
The housing is divided into multiple accessible openings (first opening for first valve module, second opening for second valve module) that allow individual access to each valve module for maintenance and adjustment. This segmentation of access paths enables easy repair while maintaining the integrated structure, resolving the contradiction between integration and maintainability.
3Area of stationary object
If valves are positioned close together in a compact housing, then space efficiency is improved, but the risk of contamination between vacuum chambers increases
Solution Approach 1:
A partition wall with a valve passage is introduced as an intermediary structure between the first and second valve modules. This partition creates separate accessible regions for each valve while maintaining compact integration, allowing space-efficient design without increasing contamination risk between vacuum chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the impact of pump-down events on other chambers by isolating pump-down gases, allowing for controlled and independent pressure management, enhancing system stability and efficiency.
Implementation Method 1
The valve module comprises a plurality of pressure sensors, each pressure sensor being configured to detect a pressure in a fluid line
Data Source
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AI summary
A valve module (104) for a vacuum pumping system, comprising: a plurality of inlets (110) for receiving a fluid; a plurality of pressure sensors (122), each configured to measure a fluid pressure associated with a respective inlet (110); a first fluid line manifold (114); a second fluid line manifold (116); a plurality of multifurcating conduits (112), each connecting a respective inlet (110) to both the first and second fluid line manifolds (114, 116); a plurality of valves (124, 126) disposed in the multifurcating conduits (112); and a valve controller (128) coupled to the sensors (122) and the valves (124, 126); wherein the valve controller (128) is configured to control, based on pressure measurements from the sensors (122), the valves (124, 126) such that a fluid flow through a multifurcating conduit (112) is directed to either only the first fluid line manifold (114) or only the second fluid line manifold (116).