Vacuum Valve Module for Isolating Chamber Pump-Down Fluctuations
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Solution Overview
Problem
In semiconductor processing, simultaneous pump-down events in multiple chambers connected to a common manifold cause undesirable pressure fluctuations, affecting the conditions within other chambers.
Innovation Solution
A valve module with pressure sensors and a controller that directs fluid flow through separate manifolds based on pressure measurements, isolating pump-down events to prevent interference between chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple chambers are connected to a common manifold for simultaneous pumping, then the system complexity is reduced and productivity is improved, but pressure fluctuations occur in chambers during pump-down events
Solution Approach 1:
The common manifold is segmented into multiple separate manifolds, with each manifold dedicated to specific chambers. This segmentation prevents pressure fluctuations from propagating across all chambers during pump-down events, while still allowing simultaneous pumping of multiple chambers through their respective manifolds.
Solution Approach 2:
Valves are introduced as intermediary components between chambers and manifolds, and between manifolds and the pump. These valves act as mediators that can isolate individual chambers or manifolds during pump-down events, preventing harmful pressure fluctuations from affecting other chambers while maintaining the overall simultaneous pumping capability.
2Reliability
If a pump-down event is performed on one chamber, then the required vacuum level is achieved in that chamber, but undesirable fluctuations occur in other connected chambers
Solution Approach 1:
Chambers are grouped into separate manifold systems, creating isolated pumping zones. When a pump-down event occurs in one chamber, the segmentation ensures that pressure fluctuations remain confined to that chamber's manifold and do not propagate to other chambers connected to different manifolds.
Solution Approach 2:
Valves are pre-configured and controlled to close isolation pathways before pump-down events begin in any chamber. This preliminary action of valve closure prevents the propagation of pressure fluctuations to other chambers before they can occur, ensuring reliable vacuum achievement without harmful side effects.
3Stability of the object's composition
If separate manifolds are used for different chambers, then pressure stability is improved, but device complexity increases
Solution Approach 1:
Multiple manifolds share common components such as the vacuum pump, control system, and valve actuation mechanisms. This multi-functionality approach allows separate manifolds to provide pressure stability while avoiding proportional increases in overall system complexity, as critical components serve multiple manifold systems simultaneously.
Solution Approach 2:
While manifolds are separated to provide pressure stability, certain system components are merged and shared across manifolds. The common pump, control electronics, and valve types are unified across all manifolds, reducing the net complexity increase that would result from complete system separation.
Data Source
AI summary
A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.