Vacuum Chamber Valve Flap Layout for Compact Retrofitting
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Solution Overview
Problem
Conventional valve configurations in vacuum installations require significant space and modifications for retrofitting, as the valve flap must be positioned outside the chamber wall, leading to increased space requirements and design complexities.
Innovation Solution
A valve assembly where the valve flap is rotated within the substrate transfer opening around an axis of rotation, allowing for a compact design that can be easily retrofitted into existing vacuum installations without major modifications, with the valve flap closing the opening by being positioned either within or adjacent to the substrate transfer gap.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the valve flap is positioned outside the chamber wall, then the sealing function is achieved, but the space requirement increases and retrofitting becomes difficult
Solution Approach 1:
Instead of positioning the valve flap outside the chamber wall as in conventional designs, the patent inverts the arrangement by positioning the valve flap inside the chamber wall, with the pivot axis located within the wall thickness. This inversion allows the valve mechanism to be integrated within the existing chamber structure, reducing external space requirements while maintaining sealing functionality.
Solution Approach 2:
The valve flap and pivot mechanism are nested within the chamber wall structure itself. The pivot axis is positioned within the wall thickness, and the valve flap rotates within the wall's internal space, effectively nesting the moving components within the existing structural envelope without requiring additional external space.
2Reliability
If the valve flap is positioned outside the chamber wall, then the sealing function is achieved, but the device complexity increases due to additional bearings and mechanisms
Solution Approach 1:
The valve mechanism is merged with the chamber wall structure. The pivot axis is integrated within the wall thickness, and the valve flap is directly connected to the wall structure, eliminating the need for separate external bearings and support mechanisms. This merging reduces device complexity while maintaining the sealing function.
3Reliability
If the valve flap is positioned outside the chamber wall, then the sealing function is achieved, but retrofitting existing installations becomes difficult requiring major modifications
Solution Approach 1:
By inverting the valve flap position to be inside the chamber wall rather than outside, the design can be integrated into existing chamber structures during retrofitting. The pivot axis positioned within the wall thickness allows the valve mechanism to be installed within the existing wall structure, minimizing the need for major modifications to retrofit existing vacuum installations.
Data Source
AI summary
According to various aspects of the disclosure, a valve assembly for a vacuum chamber housing may have: a valve housing, which has a substrate transfer gap; a valve flap, which is mounted so as to be rotatable about an axis of rotation, thus enabling said flap to be rotated into a first position and into a second position, wherein the axis of rotation is arranged in the substrate transfer gap, and wherein the substrate transfer gap is extended longitudinally along the axis of rotation; wherein the valve flap closes the substrate transfer gap in the first position and is arranged adjacent to the substrate transfer gap in the second position.